7/1/2010	12:03:07 AM	Helium valve closed
7/1/2010	12:03:07 AM	H2 valve closed
7/1/2010	12:03:07 AM	BCl3 valve closed
7/1/2010	12:03:07 AM	PH3 valve closed
7/1/2010	12:03:07 AM	SiCl4 pre valve closed
7/1/2010	12:03:07 AM	SiCl4 post valve closed
7/1/2010	12:03:07 AM	Main Vac valve closed
7/1/2010	12:03:07 AM	Bypass valve closed
7/1/2010	12:03:07 AM	Bubbler valve closed
7/1/2010	12:03:07 AM	Helium MFC set to  0.000000
7/1/2010	12:03:07 AM	H2 MFC set to  0.000000
7/1/2010	12:03:07 AM	BCl3 MFC set to  0.000000
7/1/2010	12:03:07 AM	PHl3 MFC set to  0.000000
7/1/2010	12:03:07 AM	SiCl4 MFC set to  0.000000
7/1/2010	12:03:07 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	12:03:07 AM	Tube furnace set to 0
7/1/2010	12:03:08 AM	Run finished at 12:03 AM
7/1/2010	12:07:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	12:07:24 AM	Recipe started at 12:07 AM
7/1/2010	12:07:24 AM	Helium valve closed
7/1/2010	12:07:24 AM	H2 valve closed
7/1/2010	12:07:24 AM	BCl3 valve closed
7/1/2010	12:07:24 AM	PH3 valve closed
7/1/2010	12:07:24 AM	SiCl4 pre valve closed
7/1/2010	12:07:24 AM	SiCl4 post valve closed
7/1/2010	12:07:24 AM	Main Vac valve closed
7/1/2010	12:07:24 AM	Bubbler valve closed
7/1/2010	12:07:24 AM	Bypass valve opened
7/1/2010	12:07:24 AM	Helium MFC set to  0.000000
7/1/2010	12:07:24 AM	H2 MFC set to  0.000000
7/1/2010	12:07:24 AM	BCl3 MFC set to  0.000000
7/1/2010	12:07:24 AM	PHl3 MFC set to  0.000000
7/1/2010	12:07:24 AM	SiCl4 MFC set to  0.000000
7/1/2010	12:07:24 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	12:07:24 AM	Tube furnace set to 0
7/1/2010	12:08:07 AM	Helium valve closed
7/1/2010	12:08:07 AM	H2 valve closed
7/1/2010	12:08:07 AM	BCl3 valve closed
7/1/2010	12:08:07 AM	PH3 valve closed
7/1/2010	12:08:07 AM	SiCl4 pre valve closed
7/1/2010	12:08:07 AM	SiCl4 post valve closed
7/1/2010	12:08:07 AM	Bubbler valve closed
7/1/2010	12:08:07 AM	Main Vac valve opened
7/1/2010	12:08:07 AM	Bypass valve opened
7/1/2010	12:08:07 AM	Helium MFC set to  0.000000
7/1/2010	12:08:07 AM	H2 MFC set to  0.000000
7/1/2010	12:08:07 AM	BCl3 MFC set to  0.000000
7/1/2010	12:08:07 AM	PHl3 MFC set to  0.000000
7/1/2010	12:08:07 AM	SiCl4 MFC set to  0.000000
7/1/2010	12:08:07 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	12:08:08 AM	Tube furnace set to 0
7/1/2010	12:08:08 AM	Run finished at 12:08 AM
7/1/2010	12:08:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	9:25:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/1/2010	9:25:55 AM	Recipe started at 9:25 AM
7/1/2010	9:25:55 AM	H2 valve closed
7/1/2010	9:25:55 AM	BCl3 valve closed
7/1/2010	9:25:55 AM	PH3 valve closed
7/1/2010	9:25:55 AM	SiCl4 pre valve closed
7/1/2010	9:25:55 AM	SiCl4 post valve closed
7/1/2010	9:25:55 AM	Main Vac valve closed
7/1/2010	9:25:55 AM	Bypass valve closed
7/1/2010	9:25:55 AM	Bubbler valve closed
7/1/2010	9:25:55 AM	Helium valve opened
7/1/2010	9:25:55 AM	Helium MFC set to  500.000000
7/1/2010	9:25:55 AM	H2 MFC set to  0.000000
7/1/2010	9:25:55 AM	BCl3 MFC set to  0.000000
7/1/2010	9:25:55 AM	PHl3 MFC set to  0.000000
7/1/2010	9:25:55 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:25:55 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:25:55 AM	Tube furnace set to 0
7/1/2010	9:27:15 AM	Helium valve closed
7/1/2010	9:27:15 AM	H2 valve closed
7/1/2010	9:27:15 AM	BCl3 valve closed
7/1/2010	9:27:15 AM	PH3 valve closed
7/1/2010	9:27:15 AM	SiCl4 pre valve closed
7/1/2010	9:27:15 AM	SiCl4 post valve closed
7/1/2010	9:27:15 AM	Main Vac valve closed
7/1/2010	9:27:15 AM	Bypass valve closed
7/1/2010	9:27:15 AM	Bubbler valve closed
7/1/2010	9:27:15 AM	Helium MFC set to  0.000000
7/1/2010	9:27:15 AM	H2 MFC set to  0.000000
7/1/2010	9:27:15 AM	BCl3 MFC set to  0.000000
7/1/2010	9:27:15 AM	PHl3 MFC set to  0.000000
7/1/2010	9:27:15 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:27:15 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:27:15 AM	Tube furnace set to 0
7/1/2010	9:27:16 AM	Run finished at 9:27 AM
7/1/2010	9:27:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/1/2010	9:45:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	9:45:29 AM	Recipe started at 9:45 AM
7/1/2010	9:45:29 AM	Helium valve closed
7/1/2010	9:45:29 AM	H2 valve closed
7/1/2010	9:45:29 AM	BCl3 valve closed
7/1/2010	9:45:29 AM	PH3 valve closed
7/1/2010	9:45:29 AM	SiCl4 pre valve closed
7/1/2010	9:45:29 AM	SiCl4 post valve closed
7/1/2010	9:45:29 AM	Main Vac valve closed
7/1/2010	9:45:29 AM	Bubbler valve closed
7/1/2010	9:45:29 AM	Bypass valve opened
7/1/2010	9:45:29 AM	Helium MFC set to  0.000000
7/1/2010	9:45:29 AM	H2 MFC set to  0.000000
7/1/2010	9:45:29 AM	BCl3 MFC set to  0.000000
7/1/2010	9:45:29 AM	PHl3 MFC set to  0.000000
7/1/2010	9:45:29 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:45:29 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:45:29 AM	Tube furnace set to 0
7/1/2010	9:46:18 AM	Helium valve closed
7/1/2010	9:46:18 AM	H2 valve closed
7/1/2010	9:46:18 AM	BCl3 valve closed
7/1/2010	9:46:18 AM	PH3 valve closed
7/1/2010	9:46:18 AM	SiCl4 pre valve closed
7/1/2010	9:46:18 AM	SiCl4 post valve closed
7/1/2010	9:46:18 AM	Bubbler valve closed
7/1/2010	9:46:18 AM	Main Vac valve opened
7/1/2010	9:46:18 AM	Bypass valve opened
7/1/2010	9:46:18 AM	Helium MFC set to  0.000000
7/1/2010	9:46:18 AM	H2 MFC set to  0.000000
7/1/2010	9:46:18 AM	BCl3 MFC set to  0.000000
7/1/2010	9:46:18 AM	PHl3 MFC set to  0.000000
7/1/2010	9:46:18 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:46:18 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:46:18 AM	Tube furnace set to 0
7/1/2010	9:46:18 AM	Run finished at 9:46 AM
7/1/2010	9:46:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	9:46:51 AM	Helium MFC set to  100.000000
7/1/2010	9:46:54 AM	Helium valve opened
7/1/2010	9:46:59 AM	Helium MFC set to  500.000000
7/1/2010	9:48:26 AM	Recipe started at 9:48 AM
7/1/2010	9:48:26 AM	Helium valve closed
7/1/2010	9:48:26 AM	H2 valve closed
7/1/2010	9:48:26 AM	BCl3 valve closed
7/1/2010	9:48:26 AM	PH3 valve closed
7/1/2010	9:48:26 AM	SiCl4 pre valve closed
7/1/2010	9:48:26 AM	SiCl4 post valve closed
7/1/2010	9:48:26 AM	Main Vac valve closed
7/1/2010	9:48:26 AM	Bubbler valve closed
7/1/2010	9:48:26 AM	Bypass valve opened
7/1/2010	9:48:26 AM	Helium MFC set to  0.000000
7/1/2010	9:48:26 AM	H2 MFC set to  0.000000
7/1/2010	9:48:26 AM	BCl3 MFC set to  0.000000
7/1/2010	9:48:26 AM	PHl3 MFC set to  0.000000
7/1/2010	9:48:26 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:48:26 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:48:26 AM	Tube furnace set to 0
7/1/2010	9:48:27 AM	Helium valve closed
7/1/2010	9:48:27 AM	H2 valve closed
7/1/2010	9:48:27 AM	BCl3 valve closed
7/1/2010	9:48:27 AM	PH3 valve closed
7/1/2010	9:48:27 AM	SiCl4 pre valve closed
7/1/2010	9:48:27 AM	SiCl4 post valve closed
7/1/2010	9:48:27 AM	Bubbler valve closed
7/1/2010	9:48:27 AM	Main Vac valve opened
7/1/2010	9:48:27 AM	Bypass valve opened
7/1/2010	9:48:27 AM	Helium MFC set to  0.000000
7/1/2010	9:48:27 AM	H2 MFC set to  0.000000
7/1/2010	9:48:27 AM	BCl3 MFC set to  0.000000
7/1/2010	9:48:27 AM	PHl3 MFC set to  0.000000
7/1/2010	9:48:27 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:48:27 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:48:27 AM	Tube furnace set to 0
7/1/2010	9:49:27 AM	H2 valve closed
7/1/2010	9:49:27 AM	BCl3 valve closed
7/1/2010	9:49:27 AM	PH3 valve closed
7/1/2010	9:49:27 AM	SiCl4 pre valve closed
7/1/2010	9:49:27 AM	SiCl4 post valve closed
7/1/2010	9:49:27 AM	Bubbler valve closed
7/1/2010	9:49:27 AM	Helium valve opened
7/1/2010	9:49:27 AM	Main Vac valve opened
7/1/2010	9:49:27 AM	Bypass valve opened
7/1/2010	9:49:27 AM	Helium MFC set to  100.000000
7/1/2010	9:49:27 AM	H2 MFC set to  0.000000
7/1/2010	9:49:27 AM	BCl3 MFC set to  0.000000
7/1/2010	9:49:27 AM	PHl3 MFC set to  0.000000
7/1/2010	9:49:27 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:49:27 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:49:27 AM	Tube furnace set to 0
7/1/2010	9:58:27 AM	Helium valve closed
7/1/2010	9:58:27 AM	H2 valve closed
7/1/2010	9:58:27 AM	BCl3 valve closed
7/1/2010	9:58:27 AM	PH3 valve closed
7/1/2010	9:58:27 AM	SiCl4 pre valve closed
7/1/2010	9:58:27 AM	SiCl4 post valve closed
7/1/2010	9:58:27 AM	Bubbler valve closed
7/1/2010	9:58:27 AM	Main Vac valve opened
7/1/2010	9:58:27 AM	Bypass valve opened
7/1/2010	9:58:27 AM	Helium MFC set to  0.000000
7/1/2010	9:58:27 AM	H2 MFC set to  0.000000
7/1/2010	9:58:27 AM	BCl3 MFC set to  0.000000
7/1/2010	9:58:27 AM	PHl3 MFC set to  0.000000
7/1/2010	9:58:27 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:58:27 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:58:27 AM	Tube furnace set to 0
7/1/2010	9:59:27 AM	H2 valve closed
7/1/2010	9:59:27 AM	BCl3 valve closed
7/1/2010	9:59:27 AM	PH3 valve closed
7/1/2010	9:59:27 AM	SiCl4 pre valve closed
7/1/2010	9:59:27 AM	SiCl4 post valve closed
7/1/2010	9:59:27 AM	Bubbler valve closed
7/1/2010	9:59:27 AM	Helium valve opened
7/1/2010	9:59:27 AM	Main Vac valve opened
7/1/2010	9:59:27 AM	Bypass valve opened
7/1/2010	9:59:27 AM	Helium MFC set to  100.000000
7/1/2010	9:59:27 AM	H2 MFC set to  0.000000
7/1/2010	9:59:27 AM	BCl3 MFC set to  0.000000
7/1/2010	9:59:27 AM	PHl3 MFC set to  0.000000
7/1/2010	9:59:27 AM	SiCl4 MFC set to  0.000000
7/1/2010	9:59:27 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:59:27 AM	Tube furnace set to 0
7/1/2010	10:08:27 AM	Helium valve closed
7/1/2010	10:08:27 AM	H2 valve closed
7/1/2010	10:08:27 AM	BCl3 valve closed
7/1/2010	10:08:27 AM	PH3 valve closed
7/1/2010	10:08:27 AM	SiCl4 pre valve closed
7/1/2010	10:08:27 AM	SiCl4 post valve closed
7/1/2010	10:08:27 AM	Bubbler valve closed
7/1/2010	10:08:27 AM	Main Vac valve opened
7/1/2010	10:08:27 AM	Bypass valve opened
7/1/2010	10:08:27 AM	Helium MFC set to  0.000000
7/1/2010	10:08:27 AM	H2 MFC set to  0.000000
7/1/2010	10:08:27 AM	BCl3 MFC set to  0.000000
7/1/2010	10:08:27 AM	PHl3 MFC set to  0.000000
7/1/2010	10:08:27 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:08:27 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:08:28 AM	Tube furnace set to 0
7/1/2010	10:09:28 AM	H2 valve closed
7/1/2010	10:09:28 AM	BCl3 valve closed
7/1/2010	10:09:28 AM	PH3 valve closed
7/1/2010	10:09:28 AM	SiCl4 pre valve closed
7/1/2010	10:09:28 AM	SiCl4 post valve closed
7/1/2010	10:09:28 AM	Bubbler valve closed
7/1/2010	10:09:28 AM	Helium valve opened
7/1/2010	10:09:28 AM	Main Vac valve opened
7/1/2010	10:09:28 AM	Bypass valve opened
7/1/2010	10:09:28 AM	Helium MFC set to  100.000000
7/1/2010	10:09:28 AM	H2 MFC set to  0.000000
7/1/2010	10:09:28 AM	BCl3 MFC set to  0.000000
7/1/2010	10:09:28 AM	PHl3 MFC set to  0.000000
7/1/2010	10:09:28 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:09:28 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:09:28 AM	Tube furnace set to 0
7/1/2010	10:18:28 AM	Helium valve closed
7/1/2010	10:18:28 AM	H2 valve closed
7/1/2010	10:18:28 AM	BCl3 valve closed
7/1/2010	10:18:28 AM	PH3 valve closed
7/1/2010	10:18:28 AM	SiCl4 pre valve closed
7/1/2010	10:18:28 AM	SiCl4 post valve closed
7/1/2010	10:18:28 AM	Bubbler valve closed
7/1/2010	10:18:28 AM	Main Vac valve opened
7/1/2010	10:18:28 AM	Bypass valve opened
7/1/2010	10:18:28 AM	Helium MFC set to  0.000000
7/1/2010	10:18:28 AM	H2 MFC set to  0.000000
7/1/2010	10:18:28 AM	BCl3 MFC set to  0.000000
7/1/2010	10:18:28 AM	PHl3 MFC set to  0.000000
7/1/2010	10:18:28 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:18:28 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:18:28 AM	Tube furnace set to 0
7/1/2010	10:18:29 AM	Run finished at 10:18 AM
7/1/2010	10:20:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:20:07 AM	Recipe started at 10:20 AM
7/1/2010	10:20:07 AM	Helium valve closed
7/1/2010	10:20:07 AM	H2 valve closed
7/1/2010	10:20:07 AM	BCl3 valve closed
7/1/2010	10:20:07 AM	PH3 valve closed
7/1/2010	10:20:07 AM	SiCl4 pre valve closed
7/1/2010	10:20:07 AM	SiCl4 post valve closed
7/1/2010	10:20:07 AM	Main Vac valve closed
7/1/2010	10:20:07 AM	Bubbler valve closed
7/1/2010	10:20:07 AM	Bypass valve opened
7/1/2010	10:20:07 AM	Helium MFC set to  0.000000
7/1/2010	10:20:07 AM	H2 MFC set to  0.000000
7/1/2010	10:20:07 AM	BCl3 MFC set to  0.000000
7/1/2010	10:20:07 AM	PHl3 MFC set to  0.000000
7/1/2010	10:20:07 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:20:07 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:20:07 AM	Tube furnace set to 0
7/1/2010	10:20:07 AM	Helium valve closed
7/1/2010	10:20:07 AM	H2 valve closed
7/1/2010	10:20:07 AM	BCl3 valve closed
7/1/2010	10:20:07 AM	PH3 valve closed
7/1/2010	10:20:07 AM	SiCl4 pre valve closed
7/1/2010	10:20:07 AM	SiCl4 post valve closed
7/1/2010	10:20:07 AM	Bubbler valve closed
7/1/2010	10:20:07 AM	Main Vac valve opened
7/1/2010	10:20:07 AM	Bypass valve opened
7/1/2010	10:20:07 AM	Helium MFC set to  0.000000
7/1/2010	10:20:07 AM	H2 MFC set to  0.000000
7/1/2010	10:20:07 AM	BCl3 MFC set to  0.000000
7/1/2010	10:20:07 AM	PHl3 MFC set to  0.000000
7/1/2010	10:20:07 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:20:07 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:20:08 AM	Tube furnace set to 0
7/1/2010	10:20:08 AM	Run finished at 10:20 AM
7/1/2010	10:20:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:20:47 AM	Recipe started at 10:20 AM
7/1/2010	10:20:47 AM	Helium valve closed
7/1/2010	10:20:47 AM	H2 valve closed
7/1/2010	10:20:47 AM	BCl3 valve closed
7/1/2010	10:20:47 AM	PH3 valve closed
7/1/2010	10:20:47 AM	SiCl4 pre valve closed
7/1/2010	10:20:47 AM	SiCl4 post valve closed
7/1/2010	10:20:47 AM	Main Vac valve closed
7/1/2010	10:20:47 AM	Bubbler valve closed
7/1/2010	10:20:47 AM	Bypass valve opened
7/1/2010	10:20:47 AM	Helium MFC set to  0.000000
7/1/2010	10:20:47 AM	H2 MFC set to  0.000000
7/1/2010	10:20:47 AM	BCl3 MFC set to  0.000000
7/1/2010	10:20:48 AM	PHl3 MFC set to  0.000000
7/1/2010	10:20:48 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:20:48 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:20:48 AM	Tube furnace set to 0
7/1/2010	10:20:48 AM	Helium valve closed
7/1/2010	10:20:48 AM	H2 valve closed
7/1/2010	10:20:48 AM	BCl3 valve closed
7/1/2010	10:20:48 AM	PH3 valve closed
7/1/2010	10:20:48 AM	SiCl4 pre valve closed
7/1/2010	10:20:48 AM	SiCl4 post valve closed
7/1/2010	10:20:48 AM	Bubbler valve closed
7/1/2010	10:20:48 AM	Main Vac valve opened
7/1/2010	10:20:48 AM	Bypass valve opened
7/1/2010	10:20:48 AM	Helium MFC set to  0.000000
7/1/2010	10:20:48 AM	H2 MFC set to  0.000000
7/1/2010	10:20:48 AM	BCl3 MFC set to  0.000000
7/1/2010	10:20:48 AM	PHl3 MFC set to  0.000000
7/1/2010	10:20:48 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:20:48 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:20:48 AM	Tube furnace set to 0
7/1/2010	10:21:48 AM	H2 valve closed
7/1/2010	10:21:48 AM	BCl3 valve closed
7/1/2010	10:21:48 AM	PH3 valve closed
7/1/2010	10:21:48 AM	SiCl4 pre valve closed
7/1/2010	10:21:48 AM	SiCl4 post valve closed
7/1/2010	10:21:48 AM	Bubbler valve closed
7/1/2010	10:21:48 AM	Helium valve opened
7/1/2010	10:21:48 AM	Main Vac valve opened
7/1/2010	10:21:48 AM	Bypass valve opened
7/1/2010	10:21:48 AM	Helium MFC set to  100.000000
7/1/2010	10:21:48 AM	H2 MFC set to  0.000000
7/1/2010	10:21:48 AM	BCl3 MFC set to  0.000000
7/1/2010	10:21:48 AM	PHl3 MFC set to  0.000000
7/1/2010	10:21:48 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:21:48 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:21:48 AM	Tube furnace set to 0
7/1/2010	10:30:48 AM	Helium valve closed
7/1/2010	10:30:48 AM	H2 valve closed
7/1/2010	10:30:48 AM	BCl3 valve closed
7/1/2010	10:30:48 AM	PH3 valve closed
7/1/2010	10:30:48 AM	SiCl4 pre valve closed
7/1/2010	10:30:48 AM	SiCl4 post valve closed
7/1/2010	10:30:48 AM	Bubbler valve closed
7/1/2010	10:30:48 AM	Main Vac valve opened
7/1/2010	10:30:48 AM	Bypass valve opened
7/1/2010	10:30:48 AM	Helium MFC set to  0.000000
7/1/2010	10:30:48 AM	H2 MFC set to  0.000000
7/1/2010	10:30:48 AM	BCl3 MFC set to  0.000000
7/1/2010	10:30:48 AM	PHl3 MFC set to  0.000000
7/1/2010	10:30:48 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:30:48 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:30:48 AM	Tube furnace set to 0
7/1/2010	10:31:48 AM	H2 valve closed
7/1/2010	10:31:48 AM	BCl3 valve closed
7/1/2010	10:31:48 AM	PH3 valve closed
7/1/2010	10:31:48 AM	SiCl4 pre valve closed
7/1/2010	10:31:48 AM	SiCl4 post valve closed
7/1/2010	10:31:48 AM	Bubbler valve closed
7/1/2010	10:31:48 AM	Helium valve opened
7/1/2010	10:31:48 AM	Main Vac valve opened
7/1/2010	10:31:48 AM	Bypass valve opened
7/1/2010	10:31:48 AM	Helium MFC set to  100.000000
7/1/2010	10:31:48 AM	H2 MFC set to  0.000000
7/1/2010	10:31:48 AM	BCl3 MFC set to  0.000000
7/1/2010	10:31:48 AM	PHl3 MFC set to  0.000000
7/1/2010	10:31:48 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:31:48 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:31:49 AM	Tube furnace set to 0
7/1/2010	10:32:11 AM	Run aborted at 10:32 AM
7/1/2010	10:32:11 AM	Helium valve closed
7/1/2010	10:32:11 AM	H2 valve closed
7/1/2010	10:32:11 AM	BCl3 valve closed
7/1/2010	10:32:11 AM	PH3 valve closed
7/1/2010	10:32:11 AM	SiCl4 pre valve closed
7/1/2010	10:32:11 AM	SiCl4 post valve closed
7/1/2010	10:32:11 AM	Bypass valve closed
7/1/2010	10:32:11 AM	Main Vac valve closed
7/1/2010	10:32:11 AM	Bubbler valve closed
7/1/2010	10:32:11 AM	Helium MFC set to  0.000000
7/1/2010	10:32:11 AM	H2 MFC set to  0.000000
7/1/2010	10:32:11 AM	BCl3 MFC set to  0.000000
7/1/2010	10:32:11 AM	PHl3 MFC set to  0.000000
7/1/2010	10:32:11 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:32:11 AM	Tube furnace set to 0
7/1/2010	10:32:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:32:14 AM	Recipe started at 10:32 AM
7/1/2010	10:32:14 AM	Helium valve closed
7/1/2010	10:32:14 AM	H2 valve closed
7/1/2010	10:32:14 AM	BCl3 valve closed
7/1/2010	10:32:14 AM	PH3 valve closed
7/1/2010	10:32:14 AM	SiCl4 pre valve closed
7/1/2010	10:32:14 AM	SiCl4 post valve closed
7/1/2010	10:32:14 AM	Main Vac valve closed
7/1/2010	10:32:14 AM	Bubbler valve closed
7/1/2010	10:32:14 AM	Bypass valve opened
7/1/2010	10:32:14 AM	Helium MFC set to  0.000000
7/1/2010	10:32:14 AM	H2 MFC set to  0.000000
7/1/2010	10:32:14 AM	BCl3 MFC set to  0.000000
7/1/2010	10:32:14 AM	PHl3 MFC set to  0.000000
7/1/2010	10:32:14 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:32:14 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:32:14 AM	Tube furnace set to 0
7/1/2010	10:32:15 AM	Helium valve closed
7/1/2010	10:32:15 AM	H2 valve closed
7/1/2010	10:32:15 AM	BCl3 valve closed
7/1/2010	10:32:15 AM	PH3 valve closed
7/1/2010	10:32:15 AM	SiCl4 pre valve closed
7/1/2010	10:32:15 AM	SiCl4 post valve closed
7/1/2010	10:32:15 AM	Bubbler valve closed
7/1/2010	10:32:15 AM	Main Vac valve opened
7/1/2010	10:32:15 AM	Bypass valve opened
7/1/2010	10:32:15 AM	Helium MFC set to  0.000000
7/1/2010	10:32:15 AM	H2 MFC set to  0.000000
7/1/2010	10:32:15 AM	BCl3 MFC set to  0.000000
7/1/2010	10:32:15 AM	PHl3 MFC set to  0.000000
7/1/2010	10:32:15 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:32:15 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:32:15 AM	Tube furnace set to 0
7/1/2010	10:32:15 AM	Run finished at 10:32 AM
7/1/2010	10:32:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:50:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	10:50:23 AM	Recipe started at 10:50 AM
7/1/2010	10:50:23 AM	Helium valve closed
7/1/2010	10:50:23 AM	H2 valve closed
7/1/2010	10:50:23 AM	BCl3 valve closed
7/1/2010	10:50:23 AM	PH3 valve closed
7/1/2010	10:50:23 AM	SiCl4 pre valve closed
7/1/2010	10:50:23 AM	SiCl4 post valve closed
7/1/2010	10:50:23 AM	Main Vac valve closed
7/1/2010	10:50:23 AM	Bypass valve closed
7/1/2010	10:50:23 AM	Bubbler valve closed
7/1/2010	10:50:23 AM	Helium MFC set to  0.000000
7/1/2010	10:50:23 AM	H2 MFC set to  0.000000
7/1/2010	10:50:23 AM	BCl3 MFC set to  0.000000
7/1/2010	10:50:23 AM	PHl3 MFC set to  0.000000
7/1/2010	10:50:23 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:50:23 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:50:23 AM	Tube furnace set to 0
7/1/2010	10:50:24 AM	Run finished at 10:50 AM
7/1/2010	10:50:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	10:50:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:50:39 AM	Recipe started at 10:50 AM
7/1/2010	10:50:39 AM	Helium valve closed
7/1/2010	10:50:39 AM	H2 valve closed
7/1/2010	10:50:39 AM	BCl3 valve closed
7/1/2010	10:50:39 AM	PH3 valve closed
7/1/2010	10:50:39 AM	SiCl4 pre valve closed
7/1/2010	10:50:39 AM	SiCl4 post valve closed
7/1/2010	10:50:39 AM	Main Vac valve closed
7/1/2010	10:50:39 AM	Bubbler valve closed
7/1/2010	10:50:39 AM	Bypass valve opened
7/1/2010	10:50:39 AM	Helium MFC set to  0.000000
7/1/2010	10:50:39 AM	H2 MFC set to  0.000000
7/1/2010	10:50:39 AM	BCl3 MFC set to  0.000000
7/1/2010	10:50:39 AM	PHl3 MFC set to  0.000000
7/1/2010	10:50:39 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:50:39 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:50:39 AM	Tube furnace set to 0
7/1/2010	10:50:39 AM	Helium valve closed
7/1/2010	10:50:39 AM	H2 valve closed
7/1/2010	10:50:39 AM	BCl3 valve closed
7/1/2010	10:50:39 AM	PH3 valve closed
7/1/2010	10:50:39 AM	SiCl4 pre valve closed
7/1/2010	10:50:39 AM	SiCl4 post valve closed
7/1/2010	10:50:39 AM	Bubbler valve closed
7/1/2010	10:50:39 AM	Main Vac valve opened
7/1/2010	10:50:39 AM	Bypass valve opened
7/1/2010	10:50:39 AM	Helium MFC set to  0.000000
7/1/2010	10:50:39 AM	H2 MFC set to  0.000000
7/1/2010	10:50:39 AM	BCl3 MFC set to  0.000000
7/1/2010	10:50:39 AM	PHl3 MFC set to  0.000000
7/1/2010	10:50:39 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:50:39 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:50:39 AM	Tube furnace set to 0
7/1/2010	10:50:40 AM	Run finished at 10:50 AM
7/1/2010	10:50:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:52:32 AM	Recipe started at 10:52 AM
7/1/2010	10:52:32 AM	Helium valve closed
7/1/2010	10:52:32 AM	BCl3 valve closed
7/1/2010	10:52:32 AM	PH3 valve closed
7/1/2010	10:52:32 AM	SiCl4 pre valve closed
7/1/2010	10:52:32 AM	SiCl4 post valve closed
7/1/2010	10:52:32 AM	Main Vac valve closed
7/1/2010	10:52:32 AM	Bypass valve closed
7/1/2010	10:52:32 AM	Bubbler valve closed
7/1/2010	10:52:32 AM	H2 valve opened
7/1/2010	10:52:32 AM	Helium MFC set to  0.000000
7/1/2010	10:52:32 AM	H2 MFC set to  500.000000
7/1/2010	10:52:32 AM	BCl3 MFC set to  0.000000
7/1/2010	10:52:32 AM	PHl3 MFC set to  0.000000
7/1/2010	10:52:32 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:52:32 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:52:32 AM	Tube furnace set to 1000
7/1/2010	10:53:55 AM	Helium valve closed
7/1/2010	10:53:55 AM	BCl3 valve closed
7/1/2010	10:53:55 AM	PH3 valve closed
7/1/2010	10:53:55 AM	SiCl4 pre valve closed
7/1/2010	10:53:55 AM	SiCl4 post valve closed
7/1/2010	10:53:55 AM	Main Vac valve closed
7/1/2010	10:53:55 AM	Bypass valve closed
7/1/2010	10:53:55 AM	H2 valve opened
7/1/2010	10:53:55 AM	Bubbler valve opened
7/1/2010	10:53:55 AM	Helium MFC set to  0.000000
7/1/2010	10:53:55 AM	H2 MFC set to  500.000000
7/1/2010	10:53:55 AM	BCl3 MFC set to  0.000000
7/1/2010	10:53:55 AM	PHl3 MFC set to  0.000000
7/1/2010	10:53:55 AM	SiCl4 MFC set to  0.000000
7/1/2010	10:53:55 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:53:55 AM	Tube furnace set to 1000
7/1/2010	11:13:55 AM	Helium valve closed
7/1/2010	11:13:55 AM	PH3 valve closed
7/1/2010	11:13:55 AM	Main Vac valve closed
7/1/2010	11:13:55 AM	Bypass valve closed
7/1/2010	11:13:55 AM	H2 valve opened
7/1/2010	11:13:55 AM	BCl3 valve opened
7/1/2010	11:13:55 AM	SiCl4 pre valve opened
7/1/2010	11:13:55 AM	SiCl4 post valve opened
7/1/2010	11:13:55 AM	Bubbler valve opened
7/1/2010	11:13:55 AM	Helium MFC set to  0.000000
7/1/2010	11:13:55 AM	H2 MFC set to  500.000000
7/1/2010	11:13:55 AM	BCl3 MFC set to  35.000000
7/1/2010	11:13:55 AM	PHl3 MFC set to  0.000000
7/1/2010	11:13:55 AM	SiCl4 MFC set to  50.000000
7/1/2010	11:13:55 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	11:13:55 AM	Tube furnace set to 1000
7/1/2010	11:33:55 AM	Helium valve closed
7/1/2010	11:33:55 AM	BCl3 valve closed
7/1/2010	11:33:55 AM	PH3 valve closed
7/1/2010	11:33:55 AM	SiCl4 pre valve closed
7/1/2010	11:33:55 AM	SiCl4 post valve closed
7/1/2010	11:33:55 AM	Main Vac valve closed
7/1/2010	11:33:55 AM	Bypass valve closed
7/1/2010	11:33:55 AM	H2 valve opened
7/1/2010	11:33:55 AM	Bubbler valve opened
7/1/2010	11:33:55 AM	Helium MFC set to  0.000000
7/1/2010	11:33:55 AM	H2 MFC set to  500.000000
7/1/2010	11:33:55 AM	BCl3 MFC set to  0.000000
7/1/2010	11:33:55 AM	PHl3 MFC set to  0.000000
7/1/2010	11:33:55 AM	SiCl4 MFC set to  0.000000
7/1/2010	11:33:55 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	11:33:55 AM	Tube furnace set to 750
7/1/2010	11:53:55 AM	H2 valve closed
7/1/2010	11:53:55 AM	BCl3 valve closed
7/1/2010	11:53:55 AM	PH3 valve closed
7/1/2010	11:53:55 AM	SiCl4 pre valve closed
7/1/2010	11:53:55 AM	SiCl4 post valve closed
7/1/2010	11:53:55 AM	Main Vac valve closed
7/1/2010	11:53:55 AM	Bypass valve closed
7/1/2010	11:53:55 AM	Helium valve opened
7/1/2010	11:53:55 AM	Bubbler valve opened
7/1/2010	11:53:55 AM	Helium MFC set to  500.000000
7/1/2010	11:53:55 AM	H2 MFC set to  0.000000
7/1/2010	11:53:55 AM	BCl3 MFC set to  0.000000
7/1/2010	11:53:55 AM	PHl3 MFC set to  0.000000
7/1/2010	11:53:55 AM	SiCl4 MFC set to  0.000000
7/1/2010	11:53:55 AM	Bypass solenoid MFC set to  0.000000
7/1/2010	11:53:55 AM	Tube furnace set to 0
7/1/2010	12:07:50 PM	Run aborted at 12:07 PM
7/1/2010	12:07:50 PM	Helium valve closed
7/1/2010	12:07:50 PM	H2 valve closed
7/1/2010	12:07:50 PM	BCl3 valve closed
7/1/2010	12:07:50 PM	PH3 valve closed
7/1/2010	12:07:50 PM	SiCl4 pre valve closed
7/1/2010	12:07:50 PM	SiCl4 post valve closed
7/1/2010	12:07:50 PM	Bypass valve closed
7/1/2010	12:07:50 PM	Main Vac valve closed
7/1/2010	12:07:50 PM	Bubbler valve closed
7/1/2010	12:07:50 PM	Helium MFC set to  0.000000
7/1/2010	12:07:50 PM	H2 MFC set to  0.000000
7/1/2010	12:07:50 PM	BCl3 MFC set to  0.000000
7/1/2010	12:07:50 PM	PHl3 MFC set to  0.000000
7/1/2010	12:07:50 PM	SiCl4 MFC set to  0.000000
7/1/2010	12:07:50 PM	Tube furnace set to 0
7/1/2010	1:56:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	1:56:05 PM	Recipe started at 1:56 PM
7/1/2010	1:56:05 PM	Helium valve closed
7/1/2010	1:56:05 PM	H2 valve closed
7/1/2010	1:56:05 PM	BCl3 valve closed
7/1/2010	1:56:05 PM	PH3 valve closed
7/1/2010	1:56:05 PM	SiCl4 pre valve closed
7/1/2010	1:56:05 PM	SiCl4 post valve closed
7/1/2010	1:56:05 PM	Main Vac valve closed
7/1/2010	1:56:05 PM	Bubbler valve closed
7/1/2010	1:56:05 PM	Bypass valve opened
7/1/2010	1:56:05 PM	Helium MFC set to  0.000000
7/1/2010	1:56:05 PM	H2 MFC set to  0.000000
7/1/2010	1:56:05 PM	BCl3 MFC set to  0.000000
7/1/2010	1:56:05 PM	PHl3 MFC set to  0.000000
7/1/2010	1:56:05 PM	SiCl4 MFC set to  0.000000
7/1/2010	1:56:05 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	1:56:05 PM	Tube furnace set to 0
7/1/2010	1:56:58 PM	Helium valve closed
7/1/2010	1:56:58 PM	H2 valve closed
7/1/2010	1:56:58 PM	BCl3 valve closed
7/1/2010	1:56:58 PM	PH3 valve closed
7/1/2010	1:56:58 PM	SiCl4 pre valve closed
7/1/2010	1:56:58 PM	SiCl4 post valve closed
7/1/2010	1:56:58 PM	Bubbler valve closed
7/1/2010	1:56:58 PM	Main Vac valve opened
7/1/2010	1:56:58 PM	Bypass valve opened
7/1/2010	1:56:58 PM	Helium MFC set to  0.000000
7/1/2010	1:56:58 PM	H2 MFC set to  0.000000
7/1/2010	1:56:58 PM	BCl3 MFC set to  0.000000
7/1/2010	1:56:58 PM	PHl3 MFC set to  0.000000
7/1/2010	1:56:58 PM	SiCl4 MFC set to  0.000000
7/1/2010	1:56:58 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	1:56:58 PM	Tube furnace set to 0
7/1/2010	1:56:58 PM	Run finished at 1:56 PM
7/1/2010	1:56:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	1:58:15 PM	Recipe started at 1:58 PM
7/1/2010	1:58:15 PM	Helium valve closed
7/1/2010	1:58:15 PM	H2 valve closed
7/1/2010	1:58:15 PM	BCl3 valve closed
7/1/2010	1:58:15 PM	PH3 valve closed
7/1/2010	1:58:15 PM	SiCl4 pre valve closed
7/1/2010	1:58:15 PM	SiCl4 post valve closed
7/1/2010	1:58:15 PM	Main Vac valve closed
7/1/2010	1:58:15 PM	Bubbler valve closed
7/1/2010	1:58:15 PM	Bypass valve opened
7/1/2010	1:58:15 PM	Helium MFC set to  0.000000
7/1/2010	1:58:15 PM	H2 MFC set to  0.000000
7/1/2010	1:58:15 PM	BCl3 MFC set to  0.000000
7/1/2010	1:58:15 PM	PHl3 MFC set to  0.000000
7/1/2010	1:58:15 PM	SiCl4 MFC set to  0.000000
7/1/2010	1:58:15 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	1:58:15 PM	Tube furnace set to 0
7/1/2010	1:58:15 PM	Helium valve closed
7/1/2010	1:58:15 PM	H2 valve closed
7/1/2010	1:58:15 PM	BCl3 valve closed
7/1/2010	1:58:15 PM	PH3 valve closed
7/1/2010	1:58:15 PM	SiCl4 pre valve closed
7/1/2010	1:58:15 PM	SiCl4 post valve closed
7/1/2010	1:58:15 PM	Bubbler valve closed
7/1/2010	1:58:15 PM	Main Vac valve opened
7/1/2010	1:58:15 PM	Bypass valve opened
7/1/2010	1:58:15 PM	Helium MFC set to  0.000000
7/1/2010	1:58:15 PM	H2 MFC set to  0.000000
7/1/2010	1:58:15 PM	BCl3 MFC set to  0.000000
7/1/2010	1:58:15 PM	PHl3 MFC set to  0.000000
7/1/2010	1:58:15 PM	SiCl4 MFC set to  0.000000
7/1/2010	1:58:15 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	1:58:15 PM	Tube furnace set to 0
7/1/2010	1:59:15 PM	H2 valve closed
7/1/2010	1:59:15 PM	BCl3 valve closed
7/1/2010	1:59:15 PM	PH3 valve closed
7/1/2010	1:59:15 PM	SiCl4 pre valve closed
7/1/2010	1:59:15 PM	SiCl4 post valve closed
7/1/2010	1:59:15 PM	Bubbler valve closed
7/1/2010	1:59:15 PM	Helium valve opened
7/1/2010	1:59:15 PM	Main Vac valve opened
7/1/2010	1:59:15 PM	Bypass valve opened
7/1/2010	1:59:15 PM	Helium MFC set to  100.000000
7/1/2010	1:59:15 PM	H2 MFC set to  0.000000
7/1/2010	1:59:15 PM	BCl3 MFC set to  0.000000
7/1/2010	1:59:15 PM	PHl3 MFC set to  0.000000
7/1/2010	1:59:15 PM	SiCl4 MFC set to  0.000000
7/1/2010	1:59:15 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	1:59:15 PM	Tube furnace set to 0
7/1/2010	2:08:15 PM	Helium valve closed
7/1/2010	2:08:15 PM	H2 valve closed
7/1/2010	2:08:15 PM	BCl3 valve closed
7/1/2010	2:08:15 PM	PH3 valve closed
7/1/2010	2:08:15 PM	SiCl4 pre valve closed
7/1/2010	2:08:15 PM	SiCl4 post valve closed
7/1/2010	2:08:15 PM	Bubbler valve closed
7/1/2010	2:08:15 PM	Main Vac valve opened
7/1/2010	2:08:15 PM	Bypass valve opened
7/1/2010	2:08:15 PM	Helium MFC set to  0.000000
7/1/2010	2:08:15 PM	H2 MFC set to  0.000000
7/1/2010	2:08:15 PM	BCl3 MFC set to  0.000000
7/1/2010	2:08:15 PM	PHl3 MFC set to  0.000000
7/1/2010	2:08:15 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:08:15 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:08:16 PM	Tube furnace set to 0
7/1/2010	2:09:16 PM	H2 valve closed
7/1/2010	2:09:16 PM	BCl3 valve closed
7/1/2010	2:09:16 PM	PH3 valve closed
7/1/2010	2:09:16 PM	SiCl4 pre valve closed
7/1/2010	2:09:16 PM	SiCl4 post valve closed
7/1/2010	2:09:16 PM	Bubbler valve closed
7/1/2010	2:09:16 PM	Helium valve opened
7/1/2010	2:09:16 PM	Main Vac valve opened
7/1/2010	2:09:16 PM	Bypass valve opened
7/1/2010	2:09:16 PM	Helium MFC set to  100.000000
7/1/2010	2:09:16 PM	H2 MFC set to  0.000000
7/1/2010	2:09:16 PM	BCl3 MFC set to  0.000000
7/1/2010	2:09:16 PM	PHl3 MFC set to  0.000000
7/1/2010	2:09:16 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:09:16 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:09:16 PM	Tube furnace set to 0
7/1/2010	2:18:16 PM	Helium valve closed
7/1/2010	2:18:16 PM	H2 valve closed
7/1/2010	2:18:16 PM	BCl3 valve closed
7/1/2010	2:18:16 PM	PH3 valve closed
7/1/2010	2:18:16 PM	SiCl4 pre valve closed
7/1/2010	2:18:16 PM	SiCl4 post valve closed
7/1/2010	2:18:16 PM	Bubbler valve closed
7/1/2010	2:18:16 PM	Main Vac valve opened
7/1/2010	2:18:16 PM	Bypass valve opened
7/1/2010	2:18:16 PM	Helium MFC set to  0.000000
7/1/2010	2:18:16 PM	H2 MFC set to  0.000000
7/1/2010	2:18:16 PM	BCl3 MFC set to  0.000000
7/1/2010	2:18:16 PM	PHl3 MFC set to  0.000000
7/1/2010	2:18:16 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:18:16 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:18:16 PM	Tube furnace set to 0
7/1/2010	2:19:16 PM	H2 valve closed
7/1/2010	2:19:16 PM	BCl3 valve closed
7/1/2010	2:19:16 PM	PH3 valve closed
7/1/2010	2:19:16 PM	SiCl4 pre valve closed
7/1/2010	2:19:16 PM	SiCl4 post valve closed
7/1/2010	2:19:16 PM	Bubbler valve closed
7/1/2010	2:19:16 PM	Helium valve opened
7/1/2010	2:19:16 PM	Main Vac valve opened
7/1/2010	2:19:16 PM	Bypass valve opened
7/1/2010	2:19:16 PM	Helium MFC set to  100.000000
7/1/2010	2:19:16 PM	H2 MFC set to  0.000000
7/1/2010	2:19:16 PM	BCl3 MFC set to  0.000000
7/1/2010	2:19:16 PM	PHl3 MFC set to  0.000000
7/1/2010	2:19:16 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:19:16 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:19:16 PM	Tube furnace set to 0
7/1/2010	2:28:16 PM	Helium valve closed
7/1/2010	2:28:16 PM	H2 valve closed
7/1/2010	2:28:16 PM	BCl3 valve closed
7/1/2010	2:28:16 PM	PH3 valve closed
7/1/2010	2:28:16 PM	SiCl4 pre valve closed
7/1/2010	2:28:16 PM	SiCl4 post valve closed
7/1/2010	2:28:16 PM	Bubbler valve closed
7/1/2010	2:28:16 PM	Main Vac valve opened
7/1/2010	2:28:16 PM	Bypass valve opened
7/1/2010	2:28:16 PM	Helium MFC set to  0.000000
7/1/2010	2:28:16 PM	H2 MFC set to  0.000000
7/1/2010	2:28:16 PM	BCl3 MFC set to  0.000000
7/1/2010	2:28:16 PM	PHl3 MFC set to  0.000000
7/1/2010	2:28:16 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:28:16 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:28:16 PM	Tube furnace set to 0
7/1/2010	2:28:17 PM	Run finished at 2:28 PM
7/1/2010	2:57:16 PM	Recipe started at 2:57 PM
7/1/2010	2:57:16 PM	Helium valve closed
7/1/2010	2:57:16 PM	H2 valve closed
7/1/2010	2:57:16 PM	BCl3 valve closed
7/1/2010	2:57:16 PM	PH3 valve closed
7/1/2010	2:57:16 PM	SiCl4 pre valve closed
7/1/2010	2:57:16 PM	SiCl4 post valve closed
7/1/2010	2:57:16 PM	Main Vac valve closed
7/1/2010	2:57:16 PM	Bubbler valve closed
7/1/2010	2:57:16 PM	Bypass valve opened
7/1/2010	2:57:16 PM	Helium MFC set to  0.000000
7/1/2010	2:57:16 PM	H2 MFC set to  0.000000
7/1/2010	2:57:16 PM	BCl3 MFC set to  0.000000
7/1/2010	2:57:16 PM	PHl3 MFC set to  0.000000
7/1/2010	2:57:16 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:57:16 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:57:17 PM	Tube furnace set to 0
7/1/2010	2:57:17 PM	Helium valve closed
7/1/2010	2:57:17 PM	H2 valve closed
7/1/2010	2:57:17 PM	BCl3 valve closed
7/1/2010	2:57:17 PM	PH3 valve closed
7/1/2010	2:57:17 PM	SiCl4 pre valve closed
7/1/2010	2:57:17 PM	SiCl4 post valve closed
7/1/2010	2:57:17 PM	Bubbler valve closed
7/1/2010	2:57:17 PM	Main Vac valve opened
7/1/2010	2:57:17 PM	Bypass valve opened
7/1/2010	2:57:17 PM	Helium MFC set to  0.000000
7/1/2010	2:57:17 PM	H2 MFC set to  0.000000
7/1/2010	2:57:17 PM	BCl3 MFC set to  0.000000
7/1/2010	2:57:17 PM	PHl3 MFC set to  0.000000
7/1/2010	2:57:17 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:57:17 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:57:17 PM	Tube furnace set to 0
7/1/2010	2:58:17 PM	H2 valve closed
7/1/2010	2:58:17 PM	BCl3 valve closed
7/1/2010	2:58:17 PM	PH3 valve closed
7/1/2010	2:58:17 PM	SiCl4 pre valve closed
7/1/2010	2:58:17 PM	SiCl4 post valve closed
7/1/2010	2:58:17 PM	Bubbler valve closed
7/1/2010	2:58:17 PM	Helium valve opened
7/1/2010	2:58:17 PM	Main Vac valve opened
7/1/2010	2:58:17 PM	Bypass valve opened
7/1/2010	2:58:17 PM	Helium MFC set to  100.000000
7/1/2010	2:58:17 PM	H2 MFC set to  0.000000
7/1/2010	2:58:17 PM	BCl3 MFC set to  0.000000
7/1/2010	2:58:17 PM	PHl3 MFC set to  0.000000
7/1/2010	2:58:17 PM	SiCl4 MFC set to  0.000000
7/1/2010	2:58:17 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	2:58:17 PM	Tube furnace set to 0
7/1/2010	3:07:17 PM	Helium valve closed
7/1/2010	3:07:17 PM	H2 valve closed
7/1/2010	3:07:17 PM	BCl3 valve closed
7/1/2010	3:07:17 PM	PH3 valve closed
7/1/2010	3:07:17 PM	SiCl4 pre valve closed
7/1/2010	3:07:17 PM	SiCl4 post valve closed
7/1/2010	3:07:17 PM	Bubbler valve closed
7/1/2010	3:07:17 PM	Main Vac valve opened
7/1/2010	3:07:17 PM	Bypass valve opened
7/1/2010	3:07:17 PM	Helium MFC set to  0.000000
7/1/2010	3:07:17 PM	H2 MFC set to  0.000000
7/1/2010	3:07:17 PM	BCl3 MFC set to  0.000000
7/1/2010	3:07:17 PM	PHl3 MFC set to  0.000000
7/1/2010	3:07:17 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:07:17 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:07:17 PM	Tube furnace set to 0
7/1/2010	3:08:17 PM	H2 valve closed
7/1/2010	3:08:17 PM	BCl3 valve closed
7/1/2010	3:08:17 PM	PH3 valve closed
7/1/2010	3:08:17 PM	SiCl4 pre valve closed
7/1/2010	3:08:17 PM	SiCl4 post valve closed
7/1/2010	3:08:17 PM	Bubbler valve closed
7/1/2010	3:08:17 PM	Helium valve opened
7/1/2010	3:08:17 PM	Main Vac valve opened
7/1/2010	3:08:17 PM	Bypass valve opened
7/1/2010	3:08:17 PM	Helium MFC set to  100.000000
7/1/2010	3:08:17 PM	H2 MFC set to  0.000000
7/1/2010	3:08:17 PM	BCl3 MFC set to  0.000000
7/1/2010	3:08:17 PM	PHl3 MFC set to  0.000000
7/1/2010	3:08:17 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:08:17 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:08:18 PM	Tube furnace set to 0
7/1/2010	3:09:22 PM	Run aborted at 3:09 PM
7/1/2010	3:09:22 PM	Helium valve closed
7/1/2010	3:09:22 PM	H2 valve closed
7/1/2010	3:09:22 PM	BCl3 valve closed
7/1/2010	3:09:22 PM	PH3 valve closed
7/1/2010	3:09:22 PM	SiCl4 pre valve closed
7/1/2010	3:09:22 PM	SiCl4 post valve closed
7/1/2010	3:09:22 PM	Bypass valve closed
7/1/2010	3:09:22 PM	Main Vac valve closed
7/1/2010	3:09:22 PM	Bubbler valve closed
7/1/2010	3:09:22 PM	Helium MFC set to  0.000000
7/1/2010	3:09:22 PM	H2 MFC set to  0.000000
7/1/2010	3:09:22 PM	BCl3 MFC set to  0.000000
7/1/2010	3:09:22 PM	PHl3 MFC set to  0.000000
7/1/2010	3:09:22 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:09:22 PM	Tube furnace set to 0
7/1/2010	3:09:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	3:09:24 PM	Recipe started at 3:09 PM
7/1/2010	3:09:24 PM	Helium valve closed
7/1/2010	3:09:24 PM	H2 valve closed
7/1/2010	3:09:24 PM	BCl3 valve closed
7/1/2010	3:09:24 PM	PH3 valve closed
7/1/2010	3:09:24 PM	SiCl4 pre valve closed
7/1/2010	3:09:24 PM	SiCl4 post valve closed
7/1/2010	3:09:24 PM	Main Vac valve closed
7/1/2010	3:09:24 PM	Bubbler valve closed
7/1/2010	3:09:24 PM	Bypass valve opened
7/1/2010	3:09:24 PM	Helium MFC set to  0.000000
7/1/2010	3:09:24 PM	H2 MFC set to  0.000000
7/1/2010	3:09:24 PM	BCl3 MFC set to  0.000000
7/1/2010	3:09:24 PM	PHl3 MFC set to  0.000000
7/1/2010	3:09:24 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:09:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:09:25 PM	Tube furnace set to 0
7/1/2010	3:09:25 PM	Helium valve closed
7/1/2010	3:09:25 PM	H2 valve closed
7/1/2010	3:09:25 PM	BCl3 valve closed
7/1/2010	3:09:25 PM	PH3 valve closed
7/1/2010	3:09:25 PM	SiCl4 pre valve closed
7/1/2010	3:09:25 PM	SiCl4 post valve closed
7/1/2010	3:09:25 PM	Bubbler valve closed
7/1/2010	3:09:25 PM	Main Vac valve opened
7/1/2010	3:09:25 PM	Bypass valve opened
7/1/2010	3:09:25 PM	Helium MFC set to  0.000000
7/1/2010	3:09:25 PM	H2 MFC set to  0.000000
7/1/2010	3:09:25 PM	BCl3 MFC set to  0.000000
7/1/2010	3:09:25 PM	PHl3 MFC set to  0.000000
7/1/2010	3:09:25 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:09:25 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:09:25 PM	Tube furnace set to 0
7/1/2010	3:09:25 PM	Run finished at 3:09 PM
7/1/2010	3:09:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	3:10:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	3:10:28 PM	Recipe started at 3:10 PM
7/1/2010	3:10:28 PM	Helium valve closed
7/1/2010	3:10:28 PM	H2 valve closed
7/1/2010	3:10:28 PM	BCl3 valve closed
7/1/2010	3:10:28 PM	PH3 valve closed
7/1/2010	3:10:28 PM	SiCl4 pre valve closed
7/1/2010	3:10:28 PM	SiCl4 post valve closed
7/1/2010	3:10:28 PM	Main Vac valve closed
7/1/2010	3:10:28 PM	Bypass valve closed
7/1/2010	3:10:28 PM	Bubbler valve closed
7/1/2010	3:10:28 PM	Helium MFC set to  0.000000
7/1/2010	3:10:28 PM	H2 MFC set to  0.000000
7/1/2010	3:10:28 PM	BCl3 MFC set to  0.000000
7/1/2010	3:10:28 PM	PHl3 MFC set to  0.000000
7/1/2010	3:10:28 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:10:28 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:10:28 PM	Tube furnace set to 0
7/1/2010	3:10:29 PM	Run finished at 3:10 PM
7/1/2010	3:10:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	3:10:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	3:10:44 PM	Recipe started at 3:10 PM
7/1/2010	3:10:44 PM	Helium valve closed
7/1/2010	3:10:44 PM	H2 valve closed
7/1/2010	3:10:44 PM	BCl3 valve closed
7/1/2010	3:10:44 PM	PH3 valve closed
7/1/2010	3:10:44 PM	SiCl4 pre valve closed
7/1/2010	3:10:44 PM	SiCl4 post valve closed
7/1/2010	3:10:44 PM	Main Vac valve closed
7/1/2010	3:10:44 PM	Bubbler valve closed
7/1/2010	3:10:44 PM	Bypass valve opened
7/1/2010	3:10:44 PM	Helium MFC set to  0.000000
7/1/2010	3:10:44 PM	H2 MFC set to  0.000000
7/1/2010	3:10:44 PM	BCl3 MFC set to  0.000000
7/1/2010	3:10:44 PM	PHl3 MFC set to  0.000000
7/1/2010	3:10:44 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:10:44 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:10:45 PM	Tube furnace set to 0
7/1/2010	3:10:45 PM	Helium valve closed
7/1/2010	3:10:45 PM	H2 valve closed
7/1/2010	3:10:45 PM	BCl3 valve closed
7/1/2010	3:10:45 PM	PH3 valve closed
7/1/2010	3:10:45 PM	SiCl4 pre valve closed
7/1/2010	3:10:45 PM	SiCl4 post valve closed
7/1/2010	3:10:45 PM	Bubbler valve closed
7/1/2010	3:10:45 PM	Main Vac valve opened
7/1/2010	3:10:45 PM	Bypass valve opened
7/1/2010	3:10:45 PM	Helium MFC set to  0.000000
7/1/2010	3:10:45 PM	H2 MFC set to  0.000000
7/1/2010	3:10:45 PM	BCl3 MFC set to  0.000000
7/1/2010	3:10:45 PM	PHl3 MFC set to  0.000000
7/1/2010	3:10:45 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:10:45 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:10:45 PM	Tube furnace set to 0
7/1/2010	3:10:45 PM	Run finished at 3:10 PM
7/1/2010	3:10:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	3:12:13 PM	Recipe started at 3:12 PM
7/1/2010	3:12:13 PM	Helium valve closed
7/1/2010	3:12:13 PM	H2 valve closed
7/1/2010	3:12:13 PM	BCl3 valve closed
7/1/2010	3:12:13 PM	PH3 valve closed
7/1/2010	3:12:13 PM	SiCl4 pre valve closed
7/1/2010	3:12:13 PM	SiCl4 post valve closed
7/1/2010	3:12:13 PM	Main Vac valve closed
7/1/2010	3:12:13 PM	Bubbler valve closed
7/1/2010	3:12:13 PM	Bypass valve opened
7/1/2010	3:12:13 PM	Helium MFC set to  0.000000
7/1/2010	3:12:13 PM	H2 MFC set to  0.000000
7/1/2010	3:12:13 PM	BCl3 MFC set to  0.000000
7/1/2010	3:12:13 PM	PHl3 MFC set to  0.000000
7/1/2010	3:12:13 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:12:13 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:12:13 PM	Tube furnace set to 0
7/1/2010	3:12:13 PM	Helium valve closed
7/1/2010	3:12:13 PM	H2 valve closed
7/1/2010	3:12:13 PM	BCl3 valve closed
7/1/2010	3:12:13 PM	PH3 valve closed
7/1/2010	3:12:13 PM	SiCl4 pre valve closed
7/1/2010	3:12:13 PM	SiCl4 post valve closed
7/1/2010	3:12:13 PM	Bubbler valve closed
7/1/2010	3:12:13 PM	Main Vac valve opened
7/1/2010	3:12:13 PM	Bypass valve opened
7/1/2010	3:12:13 PM	Helium MFC set to  0.000000
7/1/2010	3:12:13 PM	H2 MFC set to  0.000000
7/1/2010	3:12:13 PM	BCl3 MFC set to  0.000000
7/1/2010	3:12:13 PM	PHl3 MFC set to  0.000000
7/1/2010	3:12:13 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:12:13 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:12:13 PM	Tube furnace set to 0
7/1/2010	3:13:13 PM	H2 valve closed
7/1/2010	3:13:13 PM	BCl3 valve closed
7/1/2010	3:13:13 PM	PH3 valve closed
7/1/2010	3:13:13 PM	SiCl4 pre valve closed
7/1/2010	3:13:13 PM	SiCl4 post valve closed
7/1/2010	3:13:13 PM	Bubbler valve closed
7/1/2010	3:13:14 PM	Helium valve opened
7/1/2010	3:13:14 PM	Main Vac valve opened
7/1/2010	3:13:14 PM	Bypass valve opened
7/1/2010	3:13:14 PM	Helium MFC set to  100.000000
7/1/2010	3:13:14 PM	H2 MFC set to  0.000000
7/1/2010	3:13:14 PM	BCl3 MFC set to  0.000000
7/1/2010	3:13:14 PM	PHl3 MFC set to  0.000000
7/1/2010	3:13:14 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:13:14 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:13:14 PM	Tube furnace set to 0
7/1/2010	3:22:14 PM	Helium valve closed
7/1/2010	3:22:14 PM	H2 valve closed
7/1/2010	3:22:14 PM	BCl3 valve closed
7/1/2010	3:22:14 PM	PH3 valve closed
7/1/2010	3:22:14 PM	SiCl4 pre valve closed
7/1/2010	3:22:14 PM	SiCl4 post valve closed
7/1/2010	3:22:14 PM	Bubbler valve closed
7/1/2010	3:22:14 PM	Main Vac valve opened
7/1/2010	3:22:14 PM	Bypass valve opened
7/1/2010	3:22:14 PM	Helium MFC set to  0.000000
7/1/2010	3:22:14 PM	H2 MFC set to  0.000000
7/1/2010	3:22:14 PM	BCl3 MFC set to  0.000000
7/1/2010	3:22:14 PM	PHl3 MFC set to  0.000000
7/1/2010	3:22:14 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:22:14 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:22:14 PM	Tube furnace set to 0
7/1/2010	3:23:14 PM	H2 valve closed
7/1/2010	3:23:14 PM	BCl3 valve closed
7/1/2010	3:23:14 PM	PH3 valve closed
7/1/2010	3:23:14 PM	SiCl4 pre valve closed
7/1/2010	3:23:14 PM	SiCl4 post valve closed
7/1/2010	3:23:14 PM	Bubbler valve closed
7/1/2010	3:23:14 PM	Helium valve opened
7/1/2010	3:23:14 PM	Main Vac valve opened
7/1/2010	3:23:14 PM	Bypass valve opened
7/1/2010	3:23:14 PM	Helium MFC set to  100.000000
7/1/2010	3:23:14 PM	H2 MFC set to  0.000000
7/1/2010	3:23:14 PM	BCl3 MFC set to  0.000000
7/1/2010	3:23:14 PM	PHl3 MFC set to  0.000000
7/1/2010	3:23:14 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:23:14 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:23:14 PM	Tube furnace set to 0
7/1/2010	3:32:14 PM	Helium valve closed
7/1/2010	3:32:14 PM	H2 valve closed
7/1/2010	3:32:14 PM	BCl3 valve closed
7/1/2010	3:32:14 PM	PH3 valve closed
7/1/2010	3:32:14 PM	SiCl4 pre valve closed
7/1/2010	3:32:14 PM	SiCl4 post valve closed
7/1/2010	3:32:14 PM	Bubbler valve closed
7/1/2010	3:32:14 PM	Main Vac valve opened
7/1/2010	3:32:14 PM	Bypass valve opened
7/1/2010	3:32:14 PM	Helium MFC set to  0.000000
7/1/2010	3:32:14 PM	H2 MFC set to  0.000000
7/1/2010	3:32:14 PM	BCl3 MFC set to  0.000000
7/1/2010	3:32:14 PM	PHl3 MFC set to  0.000000
7/1/2010	3:32:14 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:32:14 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:32:14 PM	Tube furnace set to 0
7/1/2010	3:33:14 PM	H2 valve closed
7/1/2010	3:33:14 PM	BCl3 valve closed
7/1/2010	3:33:14 PM	PH3 valve closed
7/1/2010	3:33:14 PM	SiCl4 pre valve closed
7/1/2010	3:33:14 PM	SiCl4 post valve closed
7/1/2010	3:33:14 PM	Bubbler valve closed
7/1/2010	3:33:14 PM	Helium valve opened
7/1/2010	3:33:14 PM	Main Vac valve opened
7/1/2010	3:33:14 PM	Bypass valve opened
7/1/2010	3:33:14 PM	Helium MFC set to  100.000000
7/1/2010	3:33:14 PM	H2 MFC set to  0.000000
7/1/2010	3:33:14 PM	BCl3 MFC set to  0.000000
7/1/2010	3:33:14 PM	PHl3 MFC set to  0.000000
7/1/2010	3:33:14 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:33:14 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:33:14 PM	Tube furnace set to 0
7/1/2010	3:42:14 PM	Helium valve closed
7/1/2010	3:42:14 PM	H2 valve closed
7/1/2010	3:42:14 PM	BCl3 valve closed
7/1/2010	3:42:14 PM	PH3 valve closed
7/1/2010	3:42:14 PM	SiCl4 pre valve closed
7/1/2010	3:42:14 PM	SiCl4 post valve closed
7/1/2010	3:42:14 PM	Bubbler valve closed
7/1/2010	3:42:14 PM	Main Vac valve opened
7/1/2010	3:42:14 PM	Bypass valve opened
7/1/2010	3:42:14 PM	Helium MFC set to  0.000000
7/1/2010	3:42:14 PM	H2 MFC set to  0.000000
7/1/2010	3:42:14 PM	BCl3 MFC set to  0.000000
7/1/2010	3:42:14 PM	PHl3 MFC set to  0.000000
7/1/2010	3:42:14 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:42:14 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:42:15 PM	Tube furnace set to 0
7/1/2010	3:42:16 PM	Run finished at 3:42 PM
7/1/2010	3:51:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	3:51:49 PM	Recipe started at 3:51 PM
7/1/2010	3:51:49 PM	Helium valve closed
7/1/2010	3:51:49 PM	H2 valve closed
7/1/2010	3:51:49 PM	BCl3 valve closed
7/1/2010	3:51:49 PM	PH3 valve closed
7/1/2010	3:51:49 PM	SiCl4 pre valve closed
7/1/2010	3:51:49 PM	SiCl4 post valve closed
7/1/2010	3:51:49 PM	Main Vac valve closed
7/1/2010	3:51:49 PM	Bypass valve closed
7/1/2010	3:51:49 PM	Bubbler valve closed
7/1/2010	3:51:49 PM	Helium MFC set to  0.000000
7/1/2010	3:51:49 PM	H2 MFC set to  0.000000
7/1/2010	3:51:49 PM	BCl3 MFC set to  0.000000
7/1/2010	3:51:49 PM	PHl3 MFC set to  0.000000
7/1/2010	3:51:49 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:51:49 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:51:49 PM	Tube furnace set to 0
7/1/2010	3:51:49 PM	Run finished at 3:51 PM
7/1/2010	3:51:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	3:52:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	3:52:01 PM	Recipe started at 3:52 PM
7/1/2010	3:52:01 PM	Helium valve closed
7/1/2010	3:52:01 PM	H2 valve closed
7/1/2010	3:52:01 PM	BCl3 valve closed
7/1/2010	3:52:01 PM	PH3 valve closed
7/1/2010	3:52:02 PM	SiCl4 pre valve closed
7/1/2010	3:52:02 PM	SiCl4 post valve closed
7/1/2010	3:52:02 PM	Main Vac valve closed
7/1/2010	3:52:02 PM	Bubbler valve closed
7/1/2010	3:52:02 PM	Bypass valve opened
7/1/2010	3:52:02 PM	Helium MFC set to  0.000000
7/1/2010	3:52:02 PM	H2 MFC set to  0.000000
7/1/2010	3:52:02 PM	BCl3 MFC set to  0.000000
7/1/2010	3:52:02 PM	PHl3 MFC set to  0.000000
7/1/2010	3:52:02 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:52:02 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:52:02 PM	Tube furnace set to 0
7/1/2010	3:52:02 PM	Helium valve closed
7/1/2010	3:52:02 PM	H2 valve closed
7/1/2010	3:52:02 PM	BCl3 valve closed
7/1/2010	3:52:02 PM	PH3 valve closed
7/1/2010	3:52:02 PM	SiCl4 pre valve closed
7/1/2010	3:52:02 PM	SiCl4 post valve closed
7/1/2010	3:52:02 PM	Bubbler valve closed
7/1/2010	3:52:02 PM	Main Vac valve opened
7/1/2010	3:52:02 PM	Bypass valve opened
7/1/2010	3:52:02 PM	Helium MFC set to  0.000000
7/1/2010	3:52:02 PM	H2 MFC set to  0.000000
7/1/2010	3:52:02 PM	BCl3 MFC set to  0.000000
7/1/2010	3:52:02 PM	PHl3 MFC set to  0.000000
7/1/2010	3:52:02 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:52:02 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:52:02 PM	Tube furnace set to 0
7/1/2010	3:52:02 PM	Run finished at 3:52 PM
7/1/2010	3:52:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	3:52:31 PM	Recipe started at 3:52 PM
7/1/2010	3:52:31 PM	Helium valve closed
7/1/2010	3:52:31 PM	H2 valve closed
7/1/2010	3:52:31 PM	BCl3 valve closed
7/1/2010	3:52:31 PM	PH3 valve closed
7/1/2010	3:52:31 PM	SiCl4 pre valve closed
7/1/2010	3:52:31 PM	SiCl4 post valve closed
7/1/2010	3:52:31 PM	Main Vac valve closed
7/1/2010	3:52:31 PM	Bubbler valve closed
7/1/2010	3:52:32 PM	Bypass valve opened
7/1/2010	3:52:32 PM	Helium MFC set to  0.000000
7/1/2010	3:52:32 PM	H2 MFC set to  0.000000
7/1/2010	3:52:32 PM	BCl3 MFC set to  0.000000
7/1/2010	3:52:32 PM	PHl3 MFC set to  0.000000
7/1/2010	3:52:32 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:52:32 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:52:32 PM	Tube furnace set to 0
7/1/2010	3:52:32 PM	Helium valve closed
7/1/2010	3:52:32 PM	H2 valve closed
7/1/2010	3:52:32 PM	BCl3 valve closed
7/1/2010	3:52:32 PM	PH3 valve closed
7/1/2010	3:52:32 PM	SiCl4 pre valve closed
7/1/2010	3:52:32 PM	SiCl4 post valve closed
7/1/2010	3:52:32 PM	Bubbler valve closed
7/1/2010	3:52:32 PM	Main Vac valve opened
7/1/2010	3:52:32 PM	Bypass valve opened
7/1/2010	3:52:32 PM	Helium MFC set to  0.000000
7/1/2010	3:52:32 PM	H2 MFC set to  0.000000
7/1/2010	3:52:32 PM	BCl3 MFC set to  0.000000
7/1/2010	3:52:32 PM	PHl3 MFC set to  0.000000
7/1/2010	3:52:32 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:52:32 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:52:32 PM	Tube furnace set to 0
7/1/2010	3:53:32 PM	H2 valve closed
7/1/2010	3:53:32 PM	BCl3 valve closed
7/1/2010	3:53:32 PM	PH3 valve closed
7/1/2010	3:53:32 PM	SiCl4 pre valve closed
7/1/2010	3:53:32 PM	SiCl4 post valve closed
7/1/2010	3:53:32 PM	Bubbler valve closed
7/1/2010	3:53:32 PM	Helium valve opened
7/1/2010	3:53:32 PM	Main Vac valve opened
7/1/2010	3:53:32 PM	Bypass valve opened
7/1/2010	3:53:32 PM	Helium MFC set to  100.000000
7/1/2010	3:53:32 PM	H2 MFC set to  0.000000
7/1/2010	3:53:32 PM	BCl3 MFC set to  0.000000
7/1/2010	3:53:32 PM	PHl3 MFC set to  0.000000
7/1/2010	3:53:32 PM	SiCl4 MFC set to  0.000000
7/1/2010	3:53:32 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	3:53:32 PM	Tube furnace set to 0
7/1/2010	4:02:32 PM	Helium valve closed
7/1/2010	4:02:32 PM	H2 valve closed
7/1/2010	4:02:32 PM	BCl3 valve closed
7/1/2010	4:02:32 PM	PH3 valve closed
7/1/2010	4:02:32 PM	SiCl4 pre valve closed
7/1/2010	4:02:32 PM	SiCl4 post valve closed
7/1/2010	4:02:32 PM	Bubbler valve closed
7/1/2010	4:02:32 PM	Main Vac valve opened
7/1/2010	4:02:32 PM	Bypass valve opened
7/1/2010	4:02:32 PM	Helium MFC set to  0.000000
7/1/2010	4:02:32 PM	H2 MFC set to  0.000000
7/1/2010	4:02:32 PM	BCl3 MFC set to  0.000000
7/1/2010	4:02:32 PM	PHl3 MFC set to  0.000000
7/1/2010	4:02:32 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:02:32 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:02:32 PM	Tube furnace set to 0
7/1/2010	4:03:32 PM	H2 valve closed
7/1/2010	4:03:32 PM	BCl3 valve closed
7/1/2010	4:03:32 PM	PH3 valve closed
7/1/2010	4:03:32 PM	SiCl4 pre valve closed
7/1/2010	4:03:32 PM	SiCl4 post valve closed
7/1/2010	4:03:32 PM	Bubbler valve closed
7/1/2010	4:03:32 PM	Helium valve opened
7/1/2010	4:03:32 PM	Main Vac valve opened
7/1/2010	4:03:32 PM	Bypass valve opened
7/1/2010	4:03:32 PM	Helium MFC set to  100.000000
7/1/2010	4:03:32 PM	H2 MFC set to  0.000000
7/1/2010	4:03:32 PM	BCl3 MFC set to  0.000000
7/1/2010	4:03:32 PM	PHl3 MFC set to  0.000000
7/1/2010	4:03:32 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:03:32 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:03:33 PM	Tube furnace set to 0
7/1/2010	4:04:33 PM	Run aborted at 4:04 PM
7/1/2010	4:04:33 PM	Helium valve closed
7/1/2010	4:04:33 PM	H2 valve closed
7/1/2010	4:04:33 PM	BCl3 valve closed
7/1/2010	4:04:33 PM	PH3 valve closed
7/1/2010	4:04:33 PM	SiCl4 pre valve closed
7/1/2010	4:04:33 PM	SiCl4 post valve closed
7/1/2010	4:04:33 PM	Bypass valve closed
7/1/2010	4:04:33 PM	Main Vac valve closed
7/1/2010	4:04:33 PM	Bubbler valve closed
7/1/2010	4:04:33 PM	Helium MFC set to  0.000000
7/1/2010	4:04:33 PM	H2 MFC set to  0.000000
7/1/2010	4:04:33 PM	BCl3 MFC set to  0.000000
7/1/2010	4:04:33 PM	PHl3 MFC set to  0.000000
7/1/2010	4:04:33 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:04:34 PM	Tube furnace set to 0
7/1/2010	4:04:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	4:04:36 PM	Recipe started at 4:04 PM
7/1/2010	4:04:36 PM	Helium valve closed
7/1/2010	4:04:36 PM	H2 valve closed
7/1/2010	4:04:36 PM	BCl3 valve closed
7/1/2010	4:04:36 PM	PH3 valve closed
7/1/2010	4:04:36 PM	SiCl4 pre valve closed
7/1/2010	4:04:36 PM	SiCl4 post valve closed
7/1/2010	4:04:36 PM	Main Vac valve closed
7/1/2010	4:04:36 PM	Bubbler valve closed
7/1/2010	4:04:36 PM	Bypass valve opened
7/1/2010	4:04:36 PM	Helium MFC set to  0.000000
7/1/2010	4:04:36 PM	H2 MFC set to  0.000000
7/1/2010	4:04:36 PM	BCl3 MFC set to  0.000000
7/1/2010	4:04:36 PM	PHl3 MFC set to  0.000000
7/1/2010	4:04:36 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:04:36 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:04:36 PM	Tube furnace set to 0
7/1/2010	4:04:36 PM	Helium valve closed
7/1/2010	4:04:36 PM	H2 valve closed
7/1/2010	4:04:36 PM	BCl3 valve closed
7/1/2010	4:04:36 PM	PH3 valve closed
7/1/2010	4:04:36 PM	SiCl4 pre valve closed
7/1/2010	4:04:36 PM	SiCl4 post valve closed
7/1/2010	4:04:36 PM	Bubbler valve closed
7/1/2010	4:04:36 PM	Main Vac valve opened
7/1/2010	4:04:36 PM	Bypass valve opened
7/1/2010	4:04:36 PM	Helium MFC set to  0.000000
7/1/2010	4:04:36 PM	H2 MFC set to  0.000000
7/1/2010	4:04:36 PM	BCl3 MFC set to  0.000000
7/1/2010	4:04:36 PM	PHl3 MFC set to  0.000000
7/1/2010	4:04:36 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:04:37 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:04:37 PM	Tube furnace set to 0
7/1/2010	4:04:37 PM	Run finished at 4:04 PM
7/1/2010	4:04:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	4:05:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	4:05:26 PM	Recipe started at 4:05 PM
7/1/2010	4:05:26 PM	Helium valve closed
7/1/2010	4:05:26 PM	H2 valve closed
7/1/2010	4:05:26 PM	BCl3 valve closed
7/1/2010	4:05:26 PM	PH3 valve closed
7/1/2010	4:05:26 PM	SiCl4 pre valve closed
7/1/2010	4:05:26 PM	SiCl4 post valve closed
7/1/2010	4:05:26 PM	Main Vac valve closed
7/1/2010	4:05:26 PM	Bypass valve closed
7/1/2010	4:05:26 PM	Bubbler valve closed
7/1/2010	4:05:26 PM	Helium MFC set to  0.000000
7/1/2010	4:05:26 PM	H2 MFC set to  0.000000
7/1/2010	4:05:26 PM	BCl3 MFC set to  0.000000
7/1/2010	4:05:26 PM	PHl3 MFC set to  0.000000
7/1/2010	4:05:26 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:05:26 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:05:26 PM	Tube furnace set to 0
7/1/2010	4:05:27 PM	Run finished at 4:05 PM
7/1/2010	4:05:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	4:05:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	4:05:38 PM	Recipe started at 4:05 PM
7/1/2010	4:05:38 PM	Helium valve closed
7/1/2010	4:05:38 PM	H2 valve closed
7/1/2010	4:05:38 PM	BCl3 valve closed
7/1/2010	4:05:38 PM	PH3 valve closed
7/1/2010	4:05:38 PM	SiCl4 pre valve closed
7/1/2010	4:05:38 PM	SiCl4 post valve closed
7/1/2010	4:05:38 PM	Main Vac valve closed
7/1/2010	4:05:38 PM	Bubbler valve closed
7/1/2010	4:05:38 PM	Bypass valve opened
7/1/2010	4:05:38 PM	Helium MFC set to  0.000000
7/1/2010	4:05:38 PM	H2 MFC set to  0.000000
7/1/2010	4:05:38 PM	BCl3 MFC set to  0.000000
7/1/2010	4:05:38 PM	PHl3 MFC set to  0.000000
7/1/2010	4:05:38 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:05:38 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:05:38 PM	Tube furnace set to 0
7/1/2010	4:05:38 PM	Helium valve closed
7/1/2010	4:05:38 PM	H2 valve closed
7/1/2010	4:05:38 PM	BCl3 valve closed
7/1/2010	4:05:38 PM	PH3 valve closed
7/1/2010	4:05:38 PM	SiCl4 pre valve closed
7/1/2010	4:05:38 PM	SiCl4 post valve closed
7/1/2010	4:05:38 PM	Bubbler valve closed
7/1/2010	4:05:38 PM	Main Vac valve opened
7/1/2010	4:05:38 PM	Bypass valve opened
7/1/2010	4:05:38 PM	Helium MFC set to  0.000000
7/1/2010	4:05:38 PM	H2 MFC set to  0.000000
7/1/2010	4:05:38 PM	BCl3 MFC set to  0.000000
7/1/2010	4:05:38 PM	PHl3 MFC set to  0.000000
7/1/2010	4:05:38 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:05:38 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:05:38 PM	Tube furnace set to 0
7/1/2010	4:05:39 PM	Run finished at 4:05 PM
7/1/2010	4:05:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	4:07:01 PM	Recipe started at 4:07 PM
7/1/2010	4:07:01 PM	Helium valve closed
7/1/2010	4:07:01 PM	BCl3 valve closed
7/1/2010	4:07:01 PM	PH3 valve closed
7/1/2010	4:07:01 PM	SiCl4 pre valve closed
7/1/2010	4:07:01 PM	SiCl4 post valve closed
7/1/2010	4:07:01 PM	Main Vac valve closed
7/1/2010	4:07:01 PM	Bypass valve closed
7/1/2010	4:07:01 PM	Bubbler valve closed
7/1/2010	4:07:01 PM	H2 valve opened
7/1/2010	4:07:01 PM	Helium MFC set to  0.000000
7/1/2010	4:07:01 PM	H2 MFC set to  500.000000
7/1/2010	4:07:01 PM	BCl3 MFC set to  0.000000
7/1/2010	4:07:01 PM	PHl3 MFC set to  0.000000
7/1/2010	4:07:01 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:07:01 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:07:01 PM	Tube furnace set to 1000
7/1/2010	4:08:23 PM	Helium valve closed
7/1/2010	4:08:23 PM	BCl3 valve closed
7/1/2010	4:08:23 PM	PH3 valve closed
7/1/2010	4:08:23 PM	SiCl4 pre valve closed
7/1/2010	4:08:23 PM	SiCl4 post valve closed
7/1/2010	4:08:23 PM	Main Vac valve closed
7/1/2010	4:08:23 PM	Bypass valve closed
7/1/2010	4:08:23 PM	H2 valve opened
7/1/2010	4:08:23 PM	Bubbler valve opened
7/1/2010	4:08:23 PM	Helium MFC set to  0.000000
7/1/2010	4:08:23 PM	H2 MFC set to  500.000000
7/1/2010	4:08:23 PM	BCl3 MFC set to  0.000000
7/1/2010	4:08:23 PM	PHl3 MFC set to  0.000000
7/1/2010	4:08:23 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:08:23 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:08:24 PM	Tube furnace set to 1000
7/1/2010	4:28:24 PM	Helium valve closed
7/1/2010	4:28:24 PM	PH3 valve closed
7/1/2010	4:28:24 PM	Main Vac valve closed
7/1/2010	4:28:24 PM	Bypass valve closed
7/1/2010	4:28:24 PM	H2 valve opened
7/1/2010	4:28:24 PM	BCl3 valve opened
7/1/2010	4:28:24 PM	SiCl4 pre valve opened
7/1/2010	4:28:24 PM	SiCl4 post valve opened
7/1/2010	4:28:24 PM	Bubbler valve opened
7/1/2010	4:28:24 PM	Helium MFC set to  0.000000
7/1/2010	4:28:24 PM	H2 MFC set to  500.000000
7/1/2010	4:28:24 PM	BCl3 MFC set to  35.000000
7/1/2010	4:28:24 PM	PHl3 MFC set to  0.000000
7/1/2010	4:28:24 PM	SiCl4 MFC set to  50.000000
7/1/2010	4:28:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:28:24 PM	Tube furnace set to 1000
7/1/2010	4:48:24 PM	Helium valve closed
7/1/2010	4:48:24 PM	BCl3 valve closed
7/1/2010	4:48:24 PM	PH3 valve closed
7/1/2010	4:48:24 PM	SiCl4 pre valve closed
7/1/2010	4:48:24 PM	SiCl4 post valve closed
7/1/2010	4:48:24 PM	Main Vac valve closed
7/1/2010	4:48:24 PM	Bypass valve closed
7/1/2010	4:48:24 PM	H2 valve opened
7/1/2010	4:48:24 PM	Bubbler valve opened
7/1/2010	4:48:24 PM	Helium MFC set to  0.000000
7/1/2010	4:48:24 PM	H2 MFC set to  500.000000
7/1/2010	4:48:24 PM	BCl3 MFC set to  0.000000
7/1/2010	4:48:24 PM	PHl3 MFC set to  0.000000
7/1/2010	4:48:24 PM	SiCl4 MFC set to  0.000000
7/1/2010	4:48:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	4:48:24 PM	Tube furnace set to 750
7/1/2010	5:08:24 PM	H2 valve closed
7/1/2010	5:08:24 PM	BCl3 valve closed
7/1/2010	5:08:24 PM	PH3 valve closed
7/1/2010	5:08:24 PM	SiCl4 pre valve closed
7/1/2010	5:08:24 PM	SiCl4 post valve closed
7/1/2010	5:08:24 PM	Main Vac valve closed
7/1/2010	5:08:24 PM	Bypass valve closed
7/1/2010	5:08:24 PM	Helium valve opened
7/1/2010	5:08:24 PM	Bubbler valve opened
7/1/2010	5:08:24 PM	Helium MFC set to  500.000000
7/1/2010	5:08:24 PM	H2 MFC set to  0.000000
7/1/2010	5:08:24 PM	BCl3 MFC set to  0.000000
7/1/2010	5:08:24 PM	PHl3 MFC set to  0.000000
7/1/2010	5:08:24 PM	SiCl4 MFC set to  0.000000
7/1/2010	5:08:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	5:08:24 PM	Tube furnace set to 0
7/1/2010	5:28:24 PM	Helium valve closed
7/1/2010	5:28:24 PM	H2 valve closed
7/1/2010	5:28:24 PM	BCl3 valve closed
7/1/2010	5:28:24 PM	PH3 valve closed
7/1/2010	5:28:24 PM	SiCl4 pre valve closed
7/1/2010	5:28:24 PM	SiCl4 post valve closed
7/1/2010	5:28:24 PM	Main Vac valve closed
7/1/2010	5:28:24 PM	Bypass valve closed
7/1/2010	5:28:24 PM	Bubbler valve closed
7/1/2010	5:28:24 PM	Helium MFC set to  0.000000
7/1/2010	5:28:24 PM	H2 MFC set to  0.000000
7/1/2010	5:28:24 PM	BCl3 MFC set to  0.000000
7/1/2010	5:28:24 PM	PHl3 MFC set to  0.000000
7/1/2010	5:28:24 PM	SiCl4 MFC set to  0.000000
7/1/2010	5:28:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	5:28:24 PM	Tube furnace set to 0
7/1/2010	5:28:24 PM	Run finished at 5:28 PM
7/1/2010	6:09:01 PM	Recipe started at 6:08 PM
7/1/2010	6:09:01 PM	Helium valve closed
7/1/2010	6:09:01 PM	H2 valve closed
7/1/2010	6:09:01 PM	BCl3 valve closed
7/1/2010	6:09:01 PM	PH3 valve closed
7/1/2010	6:09:01 PM	SiCl4 pre valve closed
7/1/2010	6:09:01 PM	SiCl4 post valve closed
7/1/2010	6:09:01 PM	Main Vac valve closed
7/1/2010	6:09:01 PM	Bubbler valve closed
7/1/2010	6:09:01 PM	Bypass valve opened
7/1/2010	6:09:01 PM	Helium MFC set to  0.000000
7/1/2010	6:09:01 PM	H2 MFC set to  0.000000
7/1/2010	6:09:01 PM	BCl3 MFC set to  0.000000
7/1/2010	6:09:01 PM	PHl3 MFC set to  0.000000
7/1/2010	6:09:01 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:09:01 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:09:01 PM	Tube furnace set to 0
7/1/2010	6:09:51 PM	Helium valve closed
7/1/2010	6:09:51 PM	H2 valve closed
7/1/2010	6:09:51 PM	BCl3 valve closed
7/1/2010	6:09:51 PM	PH3 valve closed
7/1/2010	6:09:51 PM	SiCl4 pre valve closed
7/1/2010	6:09:51 PM	SiCl4 post valve closed
7/1/2010	6:09:51 PM	Bubbler valve closed
7/1/2010	6:09:51 PM	Main Vac valve opened
7/1/2010	6:09:51 PM	Bypass valve opened
7/1/2010	6:09:51 PM	Helium MFC set to  0.000000
7/1/2010	6:09:51 PM	H2 MFC set to  0.000000
7/1/2010	6:09:51 PM	BCl3 MFC set to  0.000000
7/1/2010	6:09:51 PM	PHl3 MFC set to  0.000000
7/1/2010	6:09:51 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:09:51 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:09:52 PM	Tube furnace set to 0
7/1/2010	6:10:52 PM	H2 valve closed
7/1/2010	6:10:52 PM	BCl3 valve closed
7/1/2010	6:10:52 PM	PH3 valve closed
7/1/2010	6:10:52 PM	SiCl4 pre valve closed
7/1/2010	6:10:52 PM	SiCl4 post valve closed
7/1/2010	6:10:52 PM	Bubbler valve closed
7/1/2010	6:10:52 PM	Helium valve opened
7/1/2010	6:10:52 PM	Main Vac valve opened
7/1/2010	6:10:52 PM	Bypass valve opened
7/1/2010	6:10:52 PM	Helium MFC set to  100.000000
7/1/2010	6:10:52 PM	H2 MFC set to  0.000000
7/1/2010	6:10:52 PM	BCl3 MFC set to  0.000000
7/1/2010	6:10:52 PM	PHl3 MFC set to  0.000000
7/1/2010	6:10:52 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:10:52 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:10:52 PM	Tube furnace set to 0
7/1/2010	6:19:52 PM	Helium valve closed
7/1/2010	6:19:52 PM	H2 valve closed
7/1/2010	6:19:52 PM	BCl3 valve closed
7/1/2010	6:19:52 PM	PH3 valve closed
7/1/2010	6:19:52 PM	SiCl4 pre valve closed
7/1/2010	6:19:52 PM	SiCl4 post valve closed
7/1/2010	6:19:52 PM	Bubbler valve closed
7/1/2010	6:19:52 PM	Main Vac valve opened
7/1/2010	6:19:52 PM	Bypass valve opened
7/1/2010	6:19:52 PM	Helium MFC set to  0.000000
7/1/2010	6:19:52 PM	H2 MFC set to  0.000000
7/1/2010	6:19:52 PM	BCl3 MFC set to  0.000000
7/1/2010	6:19:52 PM	PHl3 MFC set to  0.000000
7/1/2010	6:19:52 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:19:52 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:19:52 PM	Tube furnace set to 0
7/1/2010	6:20:52 PM	H2 valve closed
7/1/2010	6:20:52 PM	BCl3 valve closed
7/1/2010	6:20:52 PM	PH3 valve closed
7/1/2010	6:20:52 PM	SiCl4 pre valve closed
7/1/2010	6:20:52 PM	SiCl4 post valve closed
7/1/2010	6:20:52 PM	Bubbler valve closed
7/1/2010	6:20:52 PM	Helium valve opened
7/1/2010	6:20:52 PM	Main Vac valve opened
7/1/2010	6:20:52 PM	Bypass valve opened
7/1/2010	6:20:52 PM	Helium MFC set to  100.000000
7/1/2010	6:20:52 PM	H2 MFC set to  0.000000
7/1/2010	6:20:52 PM	BCl3 MFC set to  0.000000
7/1/2010	6:20:52 PM	PHl3 MFC set to  0.000000
7/1/2010	6:20:52 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:20:52 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:20:52 PM	Tube furnace set to 0
7/1/2010	6:29:52 PM	Helium valve closed
7/1/2010	6:29:52 PM	H2 valve closed
7/1/2010	6:29:52 PM	BCl3 valve closed
7/1/2010	6:29:52 PM	PH3 valve closed
7/1/2010	6:29:52 PM	SiCl4 pre valve closed
7/1/2010	6:29:52 PM	SiCl4 post valve closed
7/1/2010	6:29:52 PM	Bubbler valve closed
7/1/2010	6:29:52 PM	Main Vac valve opened
7/1/2010	6:29:52 PM	Bypass valve opened
7/1/2010	6:29:52 PM	Helium MFC set to  0.000000
7/1/2010	6:29:52 PM	H2 MFC set to  0.000000
7/1/2010	6:29:52 PM	BCl3 MFC set to  0.000000
7/1/2010	6:29:52 PM	PHl3 MFC set to  0.000000
7/1/2010	6:29:52 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:29:52 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:29:52 PM	Tube furnace set to 0
7/1/2010	6:30:52 PM	H2 valve closed
7/1/2010	6:30:52 PM	BCl3 valve closed
7/1/2010	6:30:52 PM	PH3 valve closed
7/1/2010	6:30:52 PM	SiCl4 pre valve closed
7/1/2010	6:30:52 PM	SiCl4 post valve closed
7/1/2010	6:30:52 PM	Bubbler valve closed
7/1/2010	6:30:52 PM	Helium valve opened
7/1/2010	6:30:52 PM	Main Vac valve opened
7/1/2010	6:30:52 PM	Bypass valve opened
7/1/2010	6:30:52 PM	Helium MFC set to  100.000000
7/1/2010	6:30:52 PM	H2 MFC set to  0.000000
7/1/2010	6:30:52 PM	BCl3 MFC set to  0.000000
7/1/2010	6:30:52 PM	PHl3 MFC set to  0.000000
7/1/2010	6:30:52 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:30:52 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:30:53 PM	Tube furnace set to 0
7/1/2010	6:39:53 PM	Helium valve closed
7/1/2010	6:39:53 PM	H2 valve closed
7/1/2010	6:39:53 PM	BCl3 valve closed
7/1/2010	6:39:53 PM	PH3 valve closed
7/1/2010	6:39:53 PM	SiCl4 pre valve closed
7/1/2010	6:39:53 PM	SiCl4 post valve closed
7/1/2010	6:39:53 PM	Bubbler valve closed
7/1/2010	6:39:53 PM	Main Vac valve opened
7/1/2010	6:39:53 PM	Bypass valve opened
7/1/2010	6:39:53 PM	Helium MFC set to  0.000000
7/1/2010	6:39:53 PM	H2 MFC set to  0.000000
7/1/2010	6:39:53 PM	BCl3 MFC set to  0.000000
7/1/2010	6:39:53 PM	PHl3 MFC set to  0.000000
7/1/2010	6:39:53 PM	SiCl4 MFC set to  0.000000
7/1/2010	6:39:53 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	6:39:53 PM	Tube furnace set to 0
7/1/2010	6:39:54 PM	Run finished at 6:39 PM
7/1/2010	7:06:41 PM	Helium MFC set to  100.000000
7/1/2010	7:06:42 PM	Helium valve opened
7/1/2010	7:06:46 PM	Helium MFC set to  500.000000
7/1/2010	8:11:37 PM	Helium valve closed
7/1/2010	8:12:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	8:13:00 PM	Recipe started at 8:12 PM
7/1/2010	8:13:00 PM	Helium valve closed
7/1/2010	8:13:00 PM	H2 valve closed
7/1/2010	8:13:00 PM	BCl3 valve closed
7/1/2010	8:13:00 PM	PH3 valve closed
7/1/2010	8:13:00 PM	SiCl4 pre valve closed
7/1/2010	8:13:00 PM	SiCl4 post valve closed
7/1/2010	8:13:00 PM	Main Vac valve closed
7/1/2010	8:13:00 PM	Bypass valve closed
7/1/2010	8:13:00 PM	Bubbler valve closed
7/1/2010	8:13:00 PM	Helium MFC set to  0.000000
7/1/2010	8:13:00 PM	H2 MFC set to  0.000000
7/1/2010	8:13:00 PM	BCl3 MFC set to  0.000000
7/1/2010	8:13:00 PM	PHl3 MFC set to  0.000000
7/1/2010	8:13:00 PM	SiCl4 MFC set to  0.000000
7/1/2010	8:13:00 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	8:13:00 PM	Tube furnace set to 0
7/1/2010	8:13:00 PM	Run finished at 8:13 PM
7/1/2010	8:13:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	8:13:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	8:13:11 PM	Recipe started at 8:13 PM
7/1/2010	8:13:11 PM	Helium valve closed
7/1/2010	8:13:11 PM	H2 valve closed
7/1/2010	8:13:11 PM	BCl3 valve closed
7/1/2010	8:13:11 PM	PH3 valve closed
7/1/2010	8:13:11 PM	SiCl4 pre valve closed
7/1/2010	8:13:11 PM	SiCl4 post valve closed
7/1/2010	8:13:11 PM	Main Vac valve closed
7/1/2010	8:13:11 PM	Bubbler valve closed
7/1/2010	8:13:11 PM	Bypass valve opened
7/1/2010	8:13:11 PM	Helium MFC set to  0.000000
7/1/2010	8:13:11 PM	H2 MFC set to  0.000000
7/1/2010	8:13:11 PM	BCl3 MFC set to  0.000000
7/1/2010	8:13:11 PM	PHl3 MFC set to  0.000000
7/1/2010	8:13:11 PM	SiCl4 MFC set to  0.000000
7/1/2010	8:13:11 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	8:13:11 PM	Tube furnace set to 0
7/1/2010	8:13:12 PM	Helium valve closed
7/1/2010	8:13:12 PM	H2 valve closed
7/1/2010	8:13:12 PM	BCl3 valve closed
7/1/2010	8:13:12 PM	PH3 valve closed
7/1/2010	8:13:12 PM	SiCl4 pre valve closed
7/1/2010	8:13:12 PM	SiCl4 post valve closed
7/1/2010	8:13:12 PM	Bubbler valve closed
7/1/2010	8:13:12 PM	Main Vac valve opened
7/1/2010	8:13:12 PM	Bypass valve opened
7/1/2010	8:13:12 PM	Helium MFC set to  0.000000
7/1/2010	8:13:12 PM	H2 MFC set to  0.000000
7/1/2010	8:13:12 PM	BCl3 MFC set to  0.000000
7/1/2010	8:13:12 PM	PHl3 MFC set to  0.000000
7/1/2010	8:13:12 PM	SiCl4 MFC set to  0.000000
7/1/2010	8:13:12 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	8:13:12 PM	Tube furnace set to 0
7/1/2010	8:13:12 PM	Run finished at 8:13 PM
7/1/2010	8:13:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	8:14:21 PM	Recipe started at 8:14 PM
7/1/2010	8:14:21 PM	Helium valve closed
7/1/2010	8:14:21 PM	BCl3 valve closed
7/1/2010	8:14:21 PM	PH3 valve closed
7/1/2010	8:14:21 PM	SiCl4 pre valve closed
7/1/2010	8:14:21 PM	SiCl4 post valve closed
7/1/2010	8:14:21 PM	Main Vac valve closed
7/1/2010	8:14:21 PM	Bypass valve closed
7/1/2010	8:14:21 PM	Bubbler valve closed
7/1/2010	8:14:21 PM	H2 valve opened
7/1/2010	8:14:21 PM	Helium MFC set to  0.000000
7/1/2010	8:14:21 PM	H2 MFC set to  500.000000
7/1/2010	8:14:21 PM	BCl3 MFC set to  0.000000
7/1/2010	8:14:21 PM	PHl3 MFC set to  0.000000
7/1/2010	8:14:21 PM	SiCl4 MFC set to  0.000000
7/1/2010	8:14:21 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	8:14:21 PM	Tube furnace set to 1000
7/1/2010	8:15:43 PM	Helium valve closed
7/1/2010	8:15:43 PM	BCl3 valve closed
7/1/2010	8:15:43 PM	PH3 valve closed
7/1/2010	8:15:43 PM	SiCl4 pre valve closed
7/1/2010	8:15:43 PM	SiCl4 post valve closed
7/1/2010	8:15:43 PM	Main Vac valve closed
7/1/2010	8:15:43 PM	Bypass valve closed
7/1/2010	8:15:43 PM	H2 valve opened
7/1/2010	8:15:43 PM	Bubbler valve opened
7/1/2010	8:15:43 PM	Helium MFC set to  0.000000
7/1/2010	8:15:43 PM	H2 MFC set to  500.000000
7/1/2010	8:15:43 PM	BCl3 MFC set to  0.000000
7/1/2010	8:15:43 PM	PHl3 MFC set to  0.000000
7/1/2010	8:15:43 PM	SiCl4 MFC set to  0.000000
7/1/2010	8:15:43 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	8:15:43 PM	Tube furnace set to 1000
7/1/2010	8:35:43 PM	Helium valve closed
7/1/2010	8:35:43 PM	PH3 valve closed
7/1/2010	8:35:43 PM	Main Vac valve closed
7/1/2010	8:35:43 PM	Bypass valve closed
7/1/2010	8:35:43 PM	H2 valve opened
7/1/2010	8:35:43 PM	BCl3 valve opened
7/1/2010	8:35:43 PM	SiCl4 pre valve opened
7/1/2010	8:35:43 PM	SiCl4 post valve opened
7/1/2010	8:35:43 PM	Bubbler valve opened
7/1/2010	8:35:43 PM	Helium MFC set to  0.000000
7/1/2010	8:35:43 PM	H2 MFC set to  500.000000
7/1/2010	8:35:43 PM	BCl3 MFC set to  35.000000
7/1/2010	8:35:43 PM	PHl3 MFC set to  0.000000
7/1/2010	8:35:43 PM	SiCl4 MFC set to  50.000000
7/1/2010	8:35:43 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	8:35:43 PM	Tube furnace set to 1000
7/1/2010	8:45:43 PM	Helium valve closed
7/1/2010	8:45:43 PM	BCl3 valve closed
7/1/2010	8:45:43 PM	PH3 valve closed
7/1/2010	8:45:43 PM	SiCl4 pre valve closed
7/1/2010	8:45:43 PM	SiCl4 post valve closed
7/1/2010	8:45:43 PM	Main Vac valve closed
7/1/2010	8:45:43 PM	Bypass valve closed
7/1/2010	8:45:43 PM	H2 valve opened
7/1/2010	8:45:43 PM	Bubbler valve opened
7/1/2010	8:45:43 PM	Helium MFC set to  0.000000
7/1/2010	8:45:43 PM	H2 MFC set to  500.000000
7/1/2010	8:45:43 PM	BCl3 MFC set to  0.000000
7/1/2010	8:45:43 PM	PHl3 MFC set to  0.000000
7/1/2010	8:45:43 PM	SiCl4 MFC set to  0.000000
7/1/2010	8:45:43 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	8:45:43 PM	Tube furnace set to 750
7/1/2010	9:05:43 PM	H2 valve closed
7/1/2010	9:05:43 PM	BCl3 valve closed
7/1/2010	9:05:43 PM	PH3 valve closed
7/1/2010	9:05:43 PM	SiCl4 pre valve closed
7/1/2010	9:05:43 PM	SiCl4 post valve closed
7/1/2010	9:05:43 PM	Main Vac valve closed
7/1/2010	9:05:43 PM	Bypass valve closed
7/1/2010	9:05:43 PM	Helium valve opened
7/1/2010	9:05:43 PM	Bubbler valve opened
7/1/2010	9:05:43 PM	Helium MFC set to  500.000000
7/1/2010	9:05:43 PM	H2 MFC set to  0.000000
7/1/2010	9:05:43 PM	BCl3 MFC set to  0.000000
7/1/2010	9:05:43 PM	PHl3 MFC set to  0.000000
7/1/2010	9:05:43 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:05:43 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:05:43 PM	Tube furnace set to 0
7/1/2010	9:14:50 PM	Run aborted at 9:14 PM
7/1/2010	9:14:50 PM	Helium valve closed
7/1/2010	9:14:50 PM	H2 valve closed
7/1/2010	9:14:50 PM	BCl3 valve closed
7/1/2010	9:14:50 PM	PH3 valve closed
7/1/2010	9:14:50 PM	SiCl4 pre valve closed
7/1/2010	9:14:50 PM	SiCl4 post valve closed
7/1/2010	9:14:50 PM	Bypass valve closed
7/1/2010	9:14:50 PM	Main Vac valve closed
7/1/2010	9:14:50 PM	Bubbler valve closed
7/1/2010	9:14:50 PM	Helium MFC set to  0.000000
7/1/2010	9:14:50 PM	H2 MFC set to  0.000000
7/1/2010	9:14:50 PM	BCl3 MFC set to  0.000000
7/1/2010	9:14:50 PM	PHl3 MFC set to  0.000000
7/1/2010	9:14:50 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:14:51 PM	Tube furnace set to 0
7/1/2010	9:34:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	9:34:47 PM	Recipe started at 9:34 PM
7/1/2010	9:34:47 PM	Helium valve closed
7/1/2010	9:34:47 PM	H2 valve closed
7/1/2010	9:34:47 PM	BCl3 valve closed
7/1/2010	9:34:47 PM	PH3 valve closed
7/1/2010	9:34:47 PM	SiCl4 pre valve closed
7/1/2010	9:34:47 PM	SiCl4 post valve closed
7/1/2010	9:34:47 PM	Main Vac valve closed
7/1/2010	9:34:47 PM	Bubbler valve closed
7/1/2010	9:34:47 PM	Bypass valve opened
7/1/2010	9:34:47 PM	Helium MFC set to  0.000000
7/1/2010	9:34:47 PM	H2 MFC set to  0.000000
7/1/2010	9:34:47 PM	BCl3 MFC set to  0.000000
7/1/2010	9:34:47 PM	PHl3 MFC set to  0.000000
7/1/2010	9:34:47 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:34:47 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:34:47 PM	Tube furnace set to 0
7/1/2010	9:35:36 PM	Helium valve closed
7/1/2010	9:35:36 PM	H2 valve closed
7/1/2010	9:35:36 PM	BCl3 valve closed
7/1/2010	9:35:36 PM	PH3 valve closed
7/1/2010	9:35:36 PM	SiCl4 pre valve closed
7/1/2010	9:35:36 PM	SiCl4 post valve closed
7/1/2010	9:35:36 PM	Bubbler valve closed
7/1/2010	9:35:36 PM	Main Vac valve opened
7/1/2010	9:35:36 PM	Bypass valve opened
7/1/2010	9:35:36 PM	Helium MFC set to  0.000000
7/1/2010	9:35:36 PM	H2 MFC set to  0.000000
7/1/2010	9:35:36 PM	BCl3 MFC set to  0.000000
7/1/2010	9:35:36 PM	PHl3 MFC set to  0.000000
7/1/2010	9:35:36 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:35:36 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:35:36 PM	Tube furnace set to 0
7/1/2010	9:35:36 PM	Run finished at 9:35 PM
7/1/2010	9:35:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	9:41:11 PM	Recipe started at 9:41 PM
7/1/2010	9:41:11 PM	Helium valve closed
7/1/2010	9:41:11 PM	H2 valve closed
7/1/2010	9:41:11 PM	BCl3 valve closed
7/1/2010	9:41:11 PM	PH3 valve closed
7/1/2010	9:41:11 PM	SiCl4 pre valve closed
7/1/2010	9:41:11 PM	SiCl4 post valve closed
7/1/2010	9:41:11 PM	Main Vac valve closed
7/1/2010	9:41:11 PM	Bubbler valve closed
7/1/2010	9:41:11 PM	Bypass valve opened
7/1/2010	9:41:11 PM	Helium MFC set to  0.000000
7/1/2010	9:41:11 PM	H2 MFC set to  0.000000
7/1/2010	9:41:11 PM	BCl3 MFC set to  0.000000
7/1/2010	9:41:11 PM	PHl3 MFC set to  0.000000
7/1/2010	9:41:11 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:41:11 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:41:11 PM	Tube furnace set to 0
7/1/2010	9:41:11 PM	Helium valve closed
7/1/2010	9:41:11 PM	H2 valve closed
7/1/2010	9:41:11 PM	BCl3 valve closed
7/1/2010	9:41:11 PM	PH3 valve closed
7/1/2010	9:41:11 PM	SiCl4 pre valve closed
7/1/2010	9:41:11 PM	SiCl4 post valve closed
7/1/2010	9:41:11 PM	Bubbler valve closed
7/1/2010	9:41:11 PM	Main Vac valve opened
7/1/2010	9:41:11 PM	Bypass valve opened
7/1/2010	9:41:11 PM	Helium MFC set to  0.000000
7/1/2010	9:41:11 PM	H2 MFC set to  0.000000
7/1/2010	9:41:11 PM	BCl3 MFC set to  0.000000
7/1/2010	9:41:11 PM	PHl3 MFC set to  0.000000
7/1/2010	9:41:11 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:41:11 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:41:12 PM	Tube furnace set to 0
7/1/2010	9:42:12 PM	H2 valve closed
7/1/2010	9:42:12 PM	BCl3 valve closed
7/1/2010	9:42:12 PM	PH3 valve closed
7/1/2010	9:42:12 PM	SiCl4 pre valve closed
7/1/2010	9:42:12 PM	SiCl4 post valve closed
7/1/2010	9:42:12 PM	Bubbler valve closed
7/1/2010	9:42:12 PM	Helium valve opened
7/1/2010	9:42:12 PM	Main Vac valve opened
7/1/2010	9:42:12 PM	Bypass valve opened
7/1/2010	9:42:12 PM	Helium MFC set to  100.000000
7/1/2010	9:42:12 PM	H2 MFC set to  0.000000
7/1/2010	9:42:12 PM	BCl3 MFC set to  0.000000
7/1/2010	9:42:12 PM	PHl3 MFC set to  0.000000
7/1/2010	9:42:12 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:42:12 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:42:12 PM	Tube furnace set to 0
7/1/2010	9:51:12 PM	Helium valve closed
7/1/2010	9:51:12 PM	H2 valve closed
7/1/2010	9:51:12 PM	BCl3 valve closed
7/1/2010	9:51:12 PM	PH3 valve closed
7/1/2010	9:51:12 PM	SiCl4 pre valve closed
7/1/2010	9:51:12 PM	SiCl4 post valve closed
7/1/2010	9:51:12 PM	Bubbler valve closed
7/1/2010	9:51:12 PM	Main Vac valve opened
7/1/2010	9:51:12 PM	Bypass valve opened
7/1/2010	9:51:12 PM	Helium MFC set to  0.000000
7/1/2010	9:51:12 PM	H2 MFC set to  0.000000
7/1/2010	9:51:12 PM	BCl3 MFC set to  0.000000
7/1/2010	9:51:12 PM	PHl3 MFC set to  0.000000
7/1/2010	9:51:12 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:51:12 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:51:12 PM	Tube furnace set to 0
7/1/2010	9:52:12 PM	H2 valve closed
7/1/2010	9:52:12 PM	BCl3 valve closed
7/1/2010	9:52:12 PM	PH3 valve closed
7/1/2010	9:52:12 PM	SiCl4 pre valve closed
7/1/2010	9:52:12 PM	SiCl4 post valve closed
7/1/2010	9:52:12 PM	Bubbler valve closed
7/1/2010	9:52:12 PM	Helium valve opened
7/1/2010	9:52:12 PM	Main Vac valve opened
7/1/2010	9:52:12 PM	Bypass valve opened
7/1/2010	9:52:12 PM	Helium MFC set to  100.000000
7/1/2010	9:52:12 PM	H2 MFC set to  0.000000
7/1/2010	9:52:12 PM	BCl3 MFC set to  0.000000
7/1/2010	9:52:12 PM	PHl3 MFC set to  0.000000
7/1/2010	9:52:12 PM	SiCl4 MFC set to  0.000000
7/1/2010	9:52:12 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	9:52:12 PM	Tube furnace set to 0
7/1/2010	10:01:12 PM	Helium valve closed
7/1/2010	10:01:12 PM	H2 valve closed
7/1/2010	10:01:12 PM	BCl3 valve closed
7/1/2010	10:01:12 PM	PH3 valve closed
7/1/2010	10:01:12 PM	SiCl4 pre valve closed
7/1/2010	10:01:12 PM	SiCl4 post valve closed
7/1/2010	10:01:12 PM	Bubbler valve closed
7/1/2010	10:01:12 PM	Main Vac valve opened
7/1/2010	10:01:12 PM	Bypass valve opened
7/1/2010	10:01:12 PM	Helium MFC set to  0.000000
7/1/2010	10:01:12 PM	H2 MFC set to  0.000000
7/1/2010	10:01:12 PM	BCl3 MFC set to  0.000000
7/1/2010	10:01:12 PM	PHl3 MFC set to  0.000000
7/1/2010	10:01:12 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:01:12 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:01:12 PM	Tube furnace set to 0
7/1/2010	10:02:12 PM	H2 valve closed
7/1/2010	10:02:12 PM	BCl3 valve closed
7/1/2010	10:02:12 PM	PH3 valve closed
7/1/2010	10:02:12 PM	SiCl4 pre valve closed
7/1/2010	10:02:12 PM	SiCl4 post valve closed
7/1/2010	10:02:12 PM	Bubbler valve closed
7/1/2010	10:02:12 PM	Helium valve opened
7/1/2010	10:02:12 PM	Main Vac valve opened
7/1/2010	10:02:12 PM	Bypass valve opened
7/1/2010	10:02:12 PM	Helium MFC set to  100.000000
7/1/2010	10:02:12 PM	H2 MFC set to  0.000000
7/1/2010	10:02:12 PM	BCl3 MFC set to  0.000000
7/1/2010	10:02:12 PM	PHl3 MFC set to  0.000000
7/1/2010	10:02:12 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:02:12 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:02:12 PM	Tube furnace set to 0
7/1/2010	10:11:12 PM	Helium valve closed
7/1/2010	10:11:12 PM	H2 valve closed
7/1/2010	10:11:12 PM	BCl3 valve closed
7/1/2010	10:11:12 PM	PH3 valve closed
7/1/2010	10:11:12 PM	SiCl4 pre valve closed
7/1/2010	10:11:12 PM	SiCl4 post valve closed
7/1/2010	10:11:12 PM	Bubbler valve closed
7/1/2010	10:11:12 PM	Main Vac valve opened
7/1/2010	10:11:12 PM	Bypass valve opened
7/1/2010	10:11:12 PM	Helium MFC set to  0.000000
7/1/2010	10:11:12 PM	H2 MFC set to  0.000000
7/1/2010	10:11:12 PM	BCl3 MFC set to  0.000000
7/1/2010	10:11:12 PM	PHl3 MFC set to  0.000000
7/1/2010	10:11:12 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:11:12 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:11:13 PM	Tube furnace set to 0
7/1/2010	10:11:14 PM	Run finished at 10:11 PM
7/1/2010	10:12:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	10:12:22 PM	Recipe started at 10:12 PM
7/1/2010	10:12:22 PM	Helium valve closed
7/1/2010	10:12:22 PM	H2 valve closed
7/1/2010	10:12:22 PM	BCl3 valve closed
7/1/2010	10:12:22 PM	PH3 valve closed
7/1/2010	10:12:22 PM	SiCl4 pre valve closed
7/1/2010	10:12:22 PM	SiCl4 post valve closed
7/1/2010	10:12:22 PM	Main Vac valve closed
7/1/2010	10:12:22 PM	Bypass valve closed
7/1/2010	10:12:22 PM	Bubbler valve closed
7/1/2010	10:12:22 PM	Helium MFC set to  0.000000
7/1/2010	10:12:22 PM	H2 MFC set to  0.000000
7/1/2010	10:12:22 PM	BCl3 MFC set to  0.000000
7/1/2010	10:12:22 PM	PHl3 MFC set to  0.000000
7/1/2010	10:12:22 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:12:22 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:12:22 PM	Tube furnace set to 0
7/1/2010	10:12:22 PM	Run finished at 10:12 PM
7/1/2010	10:12:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	10:12:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:12:29 PM	Recipe started at 10:12 PM
7/1/2010	10:12:29 PM	Helium valve closed
7/1/2010	10:12:29 PM	H2 valve closed
7/1/2010	10:12:29 PM	BCl3 valve closed
7/1/2010	10:12:29 PM	PH3 valve closed
7/1/2010	10:12:29 PM	SiCl4 pre valve closed
7/1/2010	10:12:29 PM	SiCl4 post valve closed
7/1/2010	10:12:29 PM	Main Vac valve closed
7/1/2010	10:12:29 PM	Bubbler valve closed
7/1/2010	10:12:29 PM	Bypass valve opened
7/1/2010	10:12:29 PM	Helium MFC set to  0.000000
7/1/2010	10:12:29 PM	H2 MFC set to  0.000000
7/1/2010	10:12:29 PM	BCl3 MFC set to  0.000000
7/1/2010	10:12:29 PM	PHl3 MFC set to  0.000000
7/1/2010	10:12:29 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:12:29 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:12:29 PM	Tube furnace set to 0
7/1/2010	10:12:30 PM	Helium valve closed
7/1/2010	10:12:30 PM	H2 valve closed
7/1/2010	10:12:30 PM	BCl3 valve closed
7/1/2010	10:12:30 PM	PH3 valve closed
7/1/2010	10:12:30 PM	SiCl4 pre valve closed
7/1/2010	10:12:30 PM	SiCl4 post valve closed
7/1/2010	10:12:30 PM	Bubbler valve closed
7/1/2010	10:12:30 PM	Main Vac valve opened
7/1/2010	10:12:30 PM	Bypass valve opened
7/1/2010	10:12:30 PM	Helium MFC set to  0.000000
7/1/2010	10:12:30 PM	H2 MFC set to  0.000000
7/1/2010	10:12:30 PM	BCl3 MFC set to  0.000000
7/1/2010	10:12:30 PM	PHl3 MFC set to  0.000000
7/1/2010	10:12:30 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:12:30 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:12:30 PM	Tube furnace set to 0
7/1/2010	10:12:30 PM	Run finished at 10:12 PM
7/1/2010	10:12:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:12:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:12:54 PM	Recipe started at 10:12 PM
7/1/2010	10:12:54 PM	Helium valve closed
7/1/2010	10:12:54 PM	H2 valve closed
7/1/2010	10:12:54 PM	BCl3 valve closed
7/1/2010	10:12:54 PM	PH3 valve closed
7/1/2010	10:12:54 PM	SiCl4 pre valve closed
7/1/2010	10:12:54 PM	SiCl4 post valve closed
7/1/2010	10:12:54 PM	Main Vac valve closed
7/1/2010	10:12:54 PM	Bubbler valve closed
7/1/2010	10:12:54 PM	Bypass valve opened
7/1/2010	10:12:54 PM	Helium MFC set to  0.000000
7/1/2010	10:12:54 PM	H2 MFC set to  0.000000
7/1/2010	10:12:54 PM	BCl3 MFC set to  0.000000
7/1/2010	10:12:54 PM	PHl3 MFC set to  0.000000
7/1/2010	10:12:54 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:12:54 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:12:54 PM	Tube furnace set to 0
7/1/2010	10:12:54 PM	Helium valve closed
7/1/2010	10:12:54 PM	H2 valve closed
7/1/2010	10:12:54 PM	BCl3 valve closed
7/1/2010	10:12:54 PM	PH3 valve closed
7/1/2010	10:12:54 PM	SiCl4 pre valve closed
7/1/2010	10:12:54 PM	SiCl4 post valve closed
7/1/2010	10:12:54 PM	Bubbler valve closed
7/1/2010	10:12:54 PM	Main Vac valve opened
7/1/2010	10:12:54 PM	Bypass valve opened
7/1/2010	10:12:54 PM	Helium MFC set to  0.000000
7/1/2010	10:12:54 PM	H2 MFC set to  0.000000
7/1/2010	10:12:54 PM	BCl3 MFC set to  0.000000
7/1/2010	10:12:54 PM	PHl3 MFC set to  0.000000
7/1/2010	10:12:54 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:12:54 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:12:54 PM	Tube furnace set to 0
7/1/2010	10:12:55 PM	Run finished at 10:12 PM
7/1/2010	10:12:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:13:13 PM	Helium MFC set to  100.000000
7/1/2010	10:13:15 PM	Helium valve opened
7/1/2010	10:13:17 PM	Helium MFC set to  500.000000
7/1/2010	10:14:40 PM	Helium valve closed
7/1/2010	10:14:42 PM	Helium MFC set to  0.000000
7/1/2010	10:15:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	10:15:43 PM	Recipe started at 10:15 PM
7/1/2010	10:15:43 PM	Helium valve closed
7/1/2010	10:15:43 PM	H2 valve closed
7/1/2010	10:15:43 PM	BCl3 valve closed
7/1/2010	10:15:43 PM	PH3 valve closed
7/1/2010	10:15:43 PM	SiCl4 pre valve closed
7/1/2010	10:15:43 PM	SiCl4 post valve closed
7/1/2010	10:15:43 PM	Main Vac valve closed
7/1/2010	10:15:43 PM	Bypass valve closed
7/1/2010	10:15:43 PM	Bubbler valve closed
7/1/2010	10:15:43 PM	Helium MFC set to  0.000000
7/1/2010	10:15:43 PM	H2 MFC set to  0.000000
7/1/2010	10:15:43 PM	BCl3 MFC set to  0.000000
7/1/2010	10:15:43 PM	PHl3 MFC set to  0.000000
7/1/2010	10:15:43 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:15:43 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:15:43 PM	Tube furnace set to 0
7/1/2010	10:15:44 PM	Run finished at 10:15 PM
7/1/2010	10:15:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/1/2010	10:16:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:16:04 PM	Recipe started at 10:16 PM
7/1/2010	10:16:04 PM	Helium valve closed
7/1/2010	10:16:04 PM	H2 valve closed
7/1/2010	10:16:04 PM	BCl3 valve closed
7/1/2010	10:16:04 PM	PH3 valve closed
7/1/2010	10:16:04 PM	SiCl4 pre valve closed
7/1/2010	10:16:04 PM	SiCl4 post valve closed
7/1/2010	10:16:04 PM	Main Vac valve closed
7/1/2010	10:16:04 PM	Bubbler valve closed
7/1/2010	10:16:04 PM	Bypass valve opened
7/1/2010	10:16:04 PM	Helium MFC set to  0.000000
7/1/2010	10:16:04 PM	H2 MFC set to  0.000000
7/1/2010	10:16:04 PM	BCl3 MFC set to  0.000000
7/1/2010	10:16:04 PM	PHl3 MFC set to  0.000000
7/1/2010	10:16:04 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:16:04 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:16:05 PM	Tube furnace set to 0
7/1/2010	10:16:05 PM	Helium valve closed
7/1/2010	10:16:05 PM	H2 valve closed
7/1/2010	10:16:05 PM	BCl3 valve closed
7/1/2010	10:16:05 PM	PH3 valve closed
7/1/2010	10:16:05 PM	SiCl4 pre valve closed
7/1/2010	10:16:05 PM	SiCl4 post valve closed
7/1/2010	10:16:05 PM	Bubbler valve closed
7/1/2010	10:16:05 PM	Main Vac valve opened
7/1/2010	10:16:05 PM	Bypass valve opened
7/1/2010	10:16:05 PM	Helium MFC set to  0.000000
7/1/2010	10:16:05 PM	H2 MFC set to  0.000000
7/1/2010	10:16:05 PM	BCl3 MFC set to  0.000000
7/1/2010	10:16:05 PM	PHl3 MFC set to  0.000000
7/1/2010	10:16:05 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:16:05 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:16:05 PM	Tube furnace set to 0
7/1/2010	10:16:05 PM	Run finished at 10:16 PM
7/1/2010	10:16:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/1/2010	10:38:19 PM	Helium MFC set to  100.000000
7/1/2010	10:38:21 PM	Helium valve opened
7/1/2010	10:47:23 PM	Helium valve closed
7/1/2010	10:47:26 PM	Helium MFC set to  0.000000
7/1/2010	10:49:02 PM	Recipe started at 10:49 PM
7/1/2010	10:49:02 PM	Helium valve closed
7/1/2010	10:49:02 PM	BCl3 valve closed
7/1/2010	10:49:02 PM	PH3 valve closed
7/1/2010	10:49:02 PM	SiCl4 pre valve closed
7/1/2010	10:49:02 PM	SiCl4 post valve closed
7/1/2010	10:49:02 PM	Main Vac valve closed
7/1/2010	10:49:02 PM	Bypass valve closed
7/1/2010	10:49:02 PM	Bubbler valve closed
7/1/2010	10:49:02 PM	H2 valve opened
7/1/2010	10:49:02 PM	Helium MFC set to  0.000000
7/1/2010	10:49:02 PM	H2 MFC set to  500.000000
7/1/2010	10:49:02 PM	BCl3 MFC set to  0.000000
7/1/2010	10:49:02 PM	PHl3 MFC set to  0.000000
7/1/2010	10:49:02 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:49:02 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:49:02 PM	Tube furnace set to 1000
7/1/2010	10:50:23 PM	Helium valve closed
7/1/2010	10:50:23 PM	BCl3 valve closed
7/1/2010	10:50:23 PM	PH3 valve closed
7/1/2010	10:50:23 PM	SiCl4 pre valve closed
7/1/2010	10:50:23 PM	SiCl4 post valve closed
7/1/2010	10:50:23 PM	Main Vac valve closed
7/1/2010	10:50:23 PM	Bypass valve closed
7/1/2010	10:50:23 PM	H2 valve opened
7/1/2010	10:50:23 PM	Bubbler valve opened
7/1/2010	10:50:23 PM	Helium MFC set to  0.000000
7/1/2010	10:50:23 PM	H2 MFC set to  500.000000
7/1/2010	10:50:23 PM	BCl3 MFC set to  0.000000
7/1/2010	10:50:23 PM	PHl3 MFC set to  0.000000
7/1/2010	10:50:23 PM	SiCl4 MFC set to  0.000000
7/1/2010	10:50:23 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	10:50:24 PM	Tube furnace set to 1000
7/1/2010	11:10:23 PM	Helium valve closed
7/1/2010	11:10:23 PM	PH3 valve closed
7/1/2010	11:10:23 PM	Main Vac valve closed
7/1/2010	11:10:24 PM	Bypass valve closed
7/1/2010	11:10:24 PM	H2 valve opened
7/1/2010	11:10:24 PM	BCl3 valve opened
7/1/2010	11:10:24 PM	SiCl4 pre valve opened
7/1/2010	11:10:24 PM	SiCl4 post valve opened
7/1/2010	11:10:24 PM	Bubbler valve opened
7/1/2010	11:10:24 PM	Helium MFC set to  0.000000
7/1/2010	11:10:24 PM	H2 MFC set to  500.000000
7/1/2010	11:10:24 PM	BCl3 MFC set to  35.000000
7/1/2010	11:10:24 PM	PHl3 MFC set to  0.000000
7/1/2010	11:10:24 PM	SiCl4 MFC set to  50.000000
7/1/2010	11:10:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	11:10:24 PM	Tube furnace set to 1000
7/1/2010	11:15:24 PM	Helium valve closed
7/1/2010	11:15:24 PM	BCl3 valve closed
7/1/2010	11:15:24 PM	PH3 valve closed
7/1/2010	11:15:24 PM	SiCl4 pre valve closed
7/1/2010	11:15:24 PM	SiCl4 post valve closed
7/1/2010	11:15:24 PM	Main Vac valve closed
7/1/2010	11:15:24 PM	Bypass valve closed
7/1/2010	11:15:24 PM	H2 valve opened
7/1/2010	11:15:24 PM	Bubbler valve opened
7/1/2010	11:15:24 PM	Helium MFC set to  0.000000
7/1/2010	11:15:24 PM	H2 MFC set to  500.000000
7/1/2010	11:15:24 PM	BCl3 MFC set to  0.000000
7/1/2010	11:15:24 PM	PHl3 MFC set to  0.000000
7/1/2010	11:15:24 PM	SiCl4 MFC set to  0.000000
7/1/2010	11:15:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	11:15:24 PM	Tube furnace set to 750
7/1/2010	11:35:24 PM	H2 valve closed
7/1/2010	11:35:24 PM	BCl3 valve closed
7/1/2010	11:35:24 PM	PH3 valve closed
7/1/2010	11:35:24 PM	SiCl4 pre valve closed
7/1/2010	11:35:24 PM	SiCl4 post valve closed
7/1/2010	11:35:24 PM	Main Vac valve closed
7/1/2010	11:35:24 PM	Bypass valve closed
7/1/2010	11:35:24 PM	Helium valve opened
7/1/2010	11:35:24 PM	Bubbler valve opened
7/1/2010	11:35:24 PM	Helium MFC set to  500.000000
7/1/2010	11:35:24 PM	H2 MFC set to  0.000000
7/1/2010	11:35:24 PM	BCl3 MFC set to  0.000000
7/1/2010	11:35:24 PM	PHl3 MFC set to  0.000000
7/1/2010	11:35:24 PM	SiCl4 MFC set to  0.000000
7/1/2010	11:35:24 PM	Bypass solenoid MFC set to  0.000000
7/1/2010	11:35:24 PM	Tube furnace set to 0
7/1/2010	11:45:40 PM	Run aborted at 11:45 PM
7/1/2010	11:45:40 PM	Helium valve closed
7/1/2010	11:45:40 PM	H2 valve closed
7/1/2010	11:45:40 PM	BCl3 valve closed
7/1/2010	11:45:40 PM	PH3 valve closed
7/1/2010	11:45:40 PM	SiCl4 pre valve closed
7/1/2010	11:45:40 PM	SiCl4 post valve closed
7/1/2010	11:45:40 PM	Bypass valve closed
7/1/2010	11:45:40 PM	Main Vac valve closed
7/1/2010	11:45:40 PM	Bubbler valve closed
7/1/2010	11:45:40 PM	Helium MFC set to  0.000000
7/1/2010	11:45:40 PM	H2 MFC set to  0.000000
7/1/2010	11:45:40 PM	BCl3 MFC set to  0.000000
7/1/2010	11:45:40 PM	PHl3 MFC set to  0.000000
7/1/2010	11:45:40 PM	SiCl4 MFC set to  0.000000
7/1/2010	11:45:40 PM	Tube furnace set to 0
